Three-axis micro-mechanical gyroscope

Abstract

The invention relates to a three-axis micro-mechanical gyroscope. The three-axis micro-mechanical gyroscope comprises a substrate and a gyroscope main body fixedly arranged on the substrate, wherein the gyroscope main body comprises a plane detecting unit and a z-axis detecting unit; the plane detecting unit comprises a first supporting beam, a linking beam, a driving electrode and a first mass block; the z-axis detecting unit comprises eight modules; and four modules are distributed at the two sides of a y-axis mass block along an x axis, the other four modules are distributed at the two sides of the x-axis mass block along a y axis, and each module comprises a second supporting beam, a decoupling beam, a driving beam, a second mass block and a detecting electrode. The three-axis micro-mechanical gyroscope has the advantages that the whole structure adopts a single-driving design and adopts a comb-tooth electrode for driving; the x axis and the y axis on the plane are detected by a variable-gap plate capacitor, the z axis is detected by a comb-tooth capacitor, and the x axis, the y axis and the z axis realize decoupling of driving and detection respectively; and the structure is compact, the manufacturing process is simple, the cost is low, the performance is higher, and good measuring accuracy and the sensitivity can be realized.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a single-structure three-axis micromechanical gyroscope with single drive and three-axis detection. It belongs to the field of microelectromechanical systems (MEMS). Background technique [0002] Micromechanical gyroscope is an inertial device based on micro-electromechanical system technology, which can be used to measure the angular velocity of object motion. Because it is designed and manufactured using MEMS technology, it has the characteristics of small size, light weight, suitable for mass production and low price, so It is applied in emerging industries such as consumer electronics products, such as digital camera image stabilization, motion control of game consoles, smart phones, handheld computers and micro-navigators. [0003] The micromechanical gyroscope includes a driving part and a detecting part, and the measurement of the angular velocity of the motion is realized t...

AI Technical Summary

Problems solved by technology

[0003] The micromechanical gyroscope includes a driving part and a detecting part, and the measurement of the angular velocity of the motion is realized through the coupling of the driving and detection motions, so its design and production are complex, and it will be more difficult to realize a highly integrated three-axis gyroscope

At present, the design and production technology of single-axis gyroscopes has matured, while the development of three-axis gyroscopes is relatively lagging behind. Generally, multiple single-axis or two-axis gyroscopes are assembled orthogonally, or multiple gyroscopes are integrated on a single substrate. However, none of these can meet the miniaturization requirements of consumer electronics products. With the development of the market and the drive of emerging industries, the single-structure highly integrated micro-mechanical three-axis gyroscope will inevitably usher in an era of rapid development.

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