Microwave attenuator

Abstract

The invention provides a microwave attenuator which comprises a substrate, and a coplanar waveguide (1), a first absorption resistor (21), a second absorption resistor (22), a first micro-mechanical switch (31) and a second micro-mechanical switch (32) which are arranged on the substrate, wherein the coplanar waveguide (1) comprises a coplanar waveguide signal wire (11), and a first coplanar waveguide earth wire (1a) and a second coplanar waveguide earth wire (1b) which are arranged symmetrically with respect to the coplanar waveguide signal wire (11); and one end of the first absorption resistor (21) is connected with the coplanar waveguide earth wire (1a), the other end of the first absorption resistor (21) is disconnected with the coplanar waveguide signal wire (11), and the first micro-mechanical switch (31) is placed in the disconnection position. The microwave attenuator controls the access of the absorption resistors by switching on or off the micro-mechanical switches, thereby realizing reconfiguration of multiple attenuations of the microwave attenuator, namely realizing reconfiguration of the attenuator structure.

Description

technical field [0001] The invention uses a micromechanical switch to control the access of a plurality of absorbing resistors of a microwave attenuator, and realizes different attenuation through the arrangement and combination of absorbing resistors with different resistance values, so as to achieve the purpose of adjusting the microwave signal power, and belongs to microelectronic devices technology field. Background technique [0002] In the radio frequency system, the microwave attenuator is very important because it can attenuate the microwave power in a wide frequency band, eliminate the output power mismatch between the stages of the multi-stage microwave amplifier circuit, and increase the reliability and stability of the system. role. Aiming at the mismatch between the output power of the preamplifier circuit and the input power of the postamplifier circuit in the multistage microwave amplifying circuit, the microwave attenuator uses impedance elements such as abs...

AI Technical Summary

Problems solved by technology

The structure can solve many problems in materials, process, reliability, repeatability and production cost, thus providing support and guarantee for the industrial application of the attenuator structure based on MEMS technology in microwave amplifying circuits

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