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Method of measuring vibration characteristics of cantilever

一种振动特性、测定方法的技术，应用在探头显微镜领域，能够解决悬臂振动影响、悬臂谐振频率检测错误等问题，达到提高精度、时间缩短的效果

Active Publication Date: 2012-09-26
HITACHI HIGH TECH SCI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The secondary vibration also affects the vibration of the cantilever, and the peak value of the amplitude occurs outside the resonant frequency of the cantilever, sometimes causing the resonant frequency detection error of the cantilever

Method used

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  • Method of measuring vibration characteristics of cantilever
  • Method of measuring vibration characteristics of cantilever
  • Method of measuring vibration characteristics of cantilever

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0039] Below, refer to figure 1 A first embodiment of the cantilever and probe microscope of the present invention will be described. In addition, in each drawing used in the following description, the scale is appropriately changed as necessary in order to make each member a recognizable size.

[0040] The cantilever 1 is connected to the side surface of the cantilever chip part 8 to form a single-arm spring structure. The cantilever chip part 8 is pressed onto the slope block 2 by the cantilever chip part pressing part 9, and the slope block 2 is fixed on the vibrator 3. The vibrator 3 passes through the The electrical signal of the vibration signal generator 4 vibrates to vibrate the cantilever, and the displacement of the probe 99 in the vertical direction of the cantilever causes the laser light irradiated from the laser light source 30 to reflect on the dichroic mirror 31 and irradiate the back surface of the cantilever 1. The amount of up and down movement of the cant...

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PUM

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Abstract

The conventional measurement of frequency-amplitude characteristics is performed on a cantilever in a long period of time, thus the error is generated at the set measurement condition. In addition, detection error of primary resonance frequency is possibly generated. A method of measuring vibration characteristics of the cantilever is characterized by including: generating a forward and backward high speed frequency sweep signal in a frequency range including a resonance frequency of the cantilever by an excitation signal generator; vibrating the cantilever; measuring frequencies at the largest amplitude in a forward path and in a backward path; and detecting an intermediate value between the measured frequencies as the resonance frequency of the cantilever. The method may further include checking whether or not there is a secondary resonance frequency that is 6.3 times the primary resonance frequency when the primary resonance frequency is detected, so as to prevent a detection error of the resonance frequency.

Description

technical field [0001] The present invention relates to a probe microscope used by vibrating a cantilever near its resonant frequency, and particularly relates to the case of measuring the vibration characteristics of a cantilever. Background technique [0002] In recent years, due to advances in ultra-precision technology using semiconductor processes, etc., cantilevers with leaf spring characteristics have been used in various devices and sensors, etc., for various measurements such as shape observation, mass, viscoelasticity, and magnetic force. In a scanning probe microscope (SPM: Scanning Probe Microscope), there is a cantilever supported in a single-arm state, and the probe (probe) at the tip of the cantilever scans the surface of the sample to measure the effect on the probe-sample. Tunneling current, interatomic force, magnetic force, viscoelasticity, etc. can be used as the deflection (displacement) of the cantilever, thereby measuring and imaging the shape and phys...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q40/00G01M7/02
CPCG01Q60/32G01Q20/02B82Y35/00
Inventor 繁野雅次鹿仓良晃
Owner HITACHI HIGH TECH SCI CORP