Temperature measurement device and temperature measuring method
A technology of temperature measurement and measurement points, applied in the field of temperature measurement devices, to achieve the effect of high-depth temperature measurement
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no. 1 Embodiment approach
[0150] figure 1 (A)~ figure 1 (C) is a diagram for explaining the method of measuring the deep temperature in the first embodiment. exist figure 1 In , only the main part (temperature measuring part) of the temperature measuring device in this embodiment is described. In addition, we will use later Figure 8 An example of the overall configuration of the temperature measuring device will be described.
[0151] First, refer to figure 1 (A). The temperature measuring device in this embodiment has: a base material 40; a first temperature sensor 50 that measures the temperature at the first measurement point p1 of the base material 40 as the first temperature Tb; a second temperature sensor 52 that measures the temperature of the base material The temperature at the second measurement point p2 different from the first measurement point p1 of 40 is taken as the second temperature Tp; 3 temperature.
[0152] The substrate 40 has: a first surface SR1 which is a contact surfac...
no. 2 Embodiment approach
[0285] In this embodiment, a second calculation formula different from that of the above-mentioned embodiment is used as the calculation formula of the deep temperature. In addition, in this embodiment, temperature measurement (acquisition of temperature information) is performed at least twice.
[0286] Figure 17 It is a figure for demonstrating the measurement method of deep temperature in 2nd Embodiment. Such as Figure 17 As shown, in this embodiment, the first measurement and the second measurement are performed, and the ambient temperature (third temperature) Tout1 in the first measurement is different from the ambient temperature (third temperature) Tout2 in the second measurement.
[0287] Let the first temperature obtained in the first measurement be Tb1, the second temperature be Tp1, the third temperature be Tout1, the first temperature obtained in the second measurement be Tb2, the second temperature be Tp2, and the third temperature be Tout2 .
[0288] The ca...
no. 3 Embodiment approach
[0310] Next, an example of a method of providing the temperature sensor on the base material 40 will be described. Figure 21 (A)~ Figure 21 (E) is a figure for demonstrating an example of the method of providing a temperature sensor on a base material. Here, the first temperature sensor 50 (composed of, for example, a thermocouple element) will be described as an example. The method described below is also similarly applied to the second temperature sensor 52 and the third temperature sensor 55 .
[0311] Figure 21 (A) shows a plan view and a cross-sectional view of the substrate 40 (including the first temperature sensor 50 ). As shown in the plan view, the substrate 40 has a square shape in the plan view, and both the vertical Y1 and the horizontal X1 are 50 mm, for example. In addition, as shown in the cross-sectional view, the height Y3 of the base material is, for example, 5 mm. Furthermore, the first temperature sensor 50 is buried in the base material 40 . The ho...
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