Conducting polymer modified super capacitor and manufacturing method thereof

A conductive polymer, supercapacitor technology, applied in electrolytic capacitors, capacitors, capacitor electrodes, etc., can solve problems such as single method and complex process

Inactive Publication Date: 2012-10-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the technical problems of single method and complex process in the existing micro-supercapacitor electrode pr...

Method used

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  • Conducting polymer modified super capacitor and manufacturing method thereof
  • Conducting polymer modified super capacitor and manufacturing method thereof
  • Conducting polymer modified super capacitor and manufacturing method thereof

Examples

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the embodiments.

[0030] A preparation method for a supercapacitor modified by a conductive polymer, comprising the following steps:

[0031] Step 1: Take two clean silicon substrates with the same shape and size, and coat them with a layer of silicon nitride (such as figure 1 shown), and then use photolithography to etch several pairs of micro-grooves in the same area on each silicon substrate, with the same isolation columns between each pair of micro-grooves (such as figure 2 shown).

[0032] Step 2: Align the micro-grooves of two silicon substrates face to face, and bond them to obtain several pairs of micro-grooves enclosed in the silicon material (such as image 3 shown).

[0033] Step 3: Etch away the silicon material above the entire area corresponding to each pair of micro-grooves plus the isolation column between the pair of micro-grooves, so that the height of the isolation column ...

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Abstract

The invention relates to a conducting polymer modified super capacitor and a manufacturing method thereof, belonging to the technical field of super capacitors. In the invention, a plurality of micro capacitors are integrated in one single silicon substrate by using the MEMS (Micro Electro Mechanical Systems) technology, and the multiple micro capacitors are connected in parallel (or connected first in series and then in parallel) to form the super capacitor. Each micro capacitor comprises a pair of micro grooves, one isolation column is arranged between two micro grooves, and the height of the isolation column is smaller than the depth of the micro grooves; a metal electrode layer and a conducting polymer film are deposited on the groove walls of the micro grooves; and the micro grooves are filled with an electrolyte and then encapsulated. During the manufacturing process of the micro capacitor, the simple and effective conducting polymer film is directly and chemically polymerized on the metal electrode layer to modify capacitor electrodes, so that the specific capacity of micro electrodes is increased and the equivalent series resistance is reduced. The conducting polymer modified super capacitor provided by the invention has the characteristics of large specific capacity and high integration level and can be used as various power or energy storage devices.

Description

technical field [0001] The invention belongs to the technical field of supercapacitors, in particular to supercapacitors modified by conductive polymers and a preparation method thereof. Background technique [0002] With the development of social economy, people pay more and more attention to green energy and ecological environment. Supercapacitors, also known as electrochemical capacitors, are a new type of energy storage device between traditional capacitors and batteries. Compared with traditional batteries, supercapacitors have higher energy density, power density and long cycle life. As a clean and efficient new energy storage device, more and more researchers have paid attention to them. The development of supercapacitor technology The core is the electrode material. According to the definition of supercapacitors by Professor B.E.Conway, an international authority in the field of supercapacitor research, supercapacitors can be divided into two categories: one is ele...

Claims

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Application Information

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IPC IPC(8): H01G9/26H01G9/04
CPCY02E60/13
Inventor 徐建华陈燕王偲宇杨文耀杨亚杰龙菁
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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