Laminated antireflective film for single-crystalline-silicon-like solar cell
A technology of solar cells and anti-reflection films, applied in circuits, electrical components, semiconductor devices, etc., can solve problems such as limited anti-reflection effects and difficulty in obtaining anti-reflection effects, and achieve good optical matching characteristics, excellent anti-reflection effects, and improved The effect of conversion efficiency
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[0016] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0017] Such as figure 1 As shown, a laminated anti-reflection film for monocrystalline silicon solar cells is provided with a ZnO hollow spherical film 2 and a silicon nitride film 1 on the front surface of a solar cell-like monocrystalline silicon substrate 3 from inside to outside.
[0018] The thickness of the ZnO hollow sphere film 2 of the present invention is 15-20nm; the thickness of the silicon nitride film 1 is 30-40nm.
[0019] The ZnO hollow sphere thin film used in the present invention has a refractive index of 2.03, and the silicon nitride thin film has a refractive index of 1.4 to 1.7. Compared with a single-layer film, this laminated film has better optical matching characteristics, not only for the silicon main body The spectral response of 550nm light has an excellent anti-reflection effect, and has a good reflection effect on light w...
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