Depositing apparatus for forming thin film

Abstract

Disclosed is a depositing apparatus for forming a thin film, the apparatus including a source container in which a source material to be deposited on a substrate is accommodated in a solid or liquid state; an evaporation chamber which couples and communicates with the source container above the source container, and through which an evaporated source material from the source container passes; a spraying hole which is formed on a top of the evaporation chamber, and sprays upward the evaporated source material passed through the evaporation chamber; a first heater which is provided above the source material inside the evaporation chamber or the source container, and supplies heat to the source material to evaporate the source material accommodated in the source container; and a block plate which is provided above the first heater inside the evaporation chamber, and prevents the source material or foreign materials contained in the source container from being sputtered and attached to the spraying hole while the first heater supplies heat to the source material.

Description

[0001] Cross References to Related Applications [0002] This application claims priority and rights to Korean Patent Application No. 10-2011-0034338 filed with the Korean Intellectual Property Office on April 13, 2011, the entire contents of which are incorporated by reference way incorporated into this article. technical field [0003] The present invention relates to a deposition apparatus for forming a thin film, and more particularly, to a deposition apparatus for forming a thin film in which an organic substance is evaporated and deposited on a substrate in the form of a thin film. Background technique [0004] Organic light-emitting devices are next-generation display devices capable of emitting light by themselves, which are excellent in viewing angle, contrast, response speed, power consumption, etc., compared with liquid crystal display (LCD) devices. [0005] The organic light emitting device includes organic light emitting diodes connected between scan lines an...

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Problems solved by technology

[0010] However, the amount of deposition sources that can be stored in the source container is limited, thus causing the following problems: the source material for deposition must be frequently refilled, and in all such cases, the deposition apparatus for forming a thin film should be shut down

Therefore, it is inevitable that there will be a problem of lower production due to production stoppages

[0012] In addition, if evaporated material accumulates on the spray holes or internal parts or operating units, it may not only have an impact on the performance of the parts and units, but in severe cases, damage the parts and units

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