Automatic ceramic base body microleakage detector and detection method thereof

Abstract

The invention discloses an automatic ceramic base body microleakage detector which comprises a material feeding part, a material loading mechanical arm, a case cover mechanical arm, a material receiving mechanical arm, a leakage detection working part and a material receiving part, wherein the leakage detection work part comprises a helium leakage mass spectrometer; the material feeding part is used for placing ceramic bases arranged in an array; the material loading mechanical arm is used for drawing discharge materials in the material feeding part and then moving the discharge materials to the leakage detection working part; the case cover mechanical arm is used for moving to the leakage detection working part and can form a seal cavity with the leakage detection working part; the helium leakage mass spectrometer is used for detecting the leakage of the ceramic base bodies; and the material receiving mechanical arm is used for drawing the whole discharge materials in the leakage detection working part and placing the materials into the material receiving part according to the leakage detection qualification condition of the materials. By using the scheme of the invention, the labor intensity of ceramic base body leakage detection can be effectively decreased, the human misoperation is reduced, the detection is reliable, the grading is accurate and the detection quality is improved.

Description

technical field [0001] The invention belongs to the field of leak detection of ceramic bases, and in particular relates to an automatic detection machine for micro-leakage of ceramic bases and a detection method thereof. Background technique [0002] Conventional leak detection production involves placing materials manually with tweezers, spraying helium with a hand-held air gun, and manually grading, which inevitably causes artificial material damage and grading errors. At the same time, it is labor-intensive and cannot meet the needs of mass production. [0003] The disadvantages of the above method are obvious. 1. The tweezers will cause damage to the material. 2. The position of the manual swing is unreliable, which may easily cause false detection. 3. The amount of helium sprayed manually cannot be controlled. If it is pumped away, it will cause helium pollution in the detection environment and interfere with the detection. 5. Manual grading and misoperation, and the in...

AI Technical Summary

Problems solved by technology

[0002] Conventional leak detection production involves placing materials manually with tweezers, spraying helium with a hand-held air gun, and manually grading, which will inevitably cause artificial material damage and grading errors. At the same time, the labor intensity is high and cannot meet the needs of mass production.

[0003] The above method has obvious disadvantages. 1. The tweezers will cause damage to the material. 2. The position of the manual swing is unreliable, which may easily cause false detection. 3. The amount of artificial helium injection cannot be controlled. Pumping away, causing helium pollution in the testing environment, interfering with testing, 5. Manual grading misoperation, and the inability to automate production are the root causes of these shortcomings

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