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Two-dimensional hot-film wind speed and direction sensor and preparation method thereof

A wind speed, wind direction, and sensor technology, which is applied in the use of thermal variables to measure fluid speed, instruments, speed/acceleration/impact measurement, etc., can solve the problems of low sensitivity and high power consumption of sensors, and achieve high sensitivity, high measurement accuracy, and responsiveness fast time effect

Inactive Publication Date: 2014-04-16
SOUTHEAST UNIV
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  • Application Information

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Problems solved by technology

However, due to the high thermal conductivity of the silicon substrate, this type of sensor consumes a lot of power and has low sensitivity

Method used

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  • Two-dimensional hot-film wind speed and direction sensor and preparation method thereof
  • Two-dimensional hot-film wind speed and direction sensor and preparation method thereof
  • Two-dimensional hot-film wind speed and direction sensor and preparation method thereof

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Embodiment Construction

[0021] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0022] Such as figure 1 and figure 2 As shown, a two-dimensional hot film wind speed and direction sensor of the present invention includes a substrate 1 , an insulating layer 2 , a temperature measuring element 3 and a heating element 4 . The substrate 1 may be made of (100) oriented single crystal silicon. A cavity 5 is provided in the substrate 1, and the distance from the top surface of the cavity 5 to the top surface of the substrate 1 is less than 10 microns. The insulating layer 2 may be made of silicon dioxide. The insulating layer 2 is pasted on the upper surface of the substrate 1 , and the temperature measuring element 3 and the heating element 4 are respectively fixed on the upper surface of the insulating layer 2 . The thickness of the insulating layer 2 is preferably 0.5 to 2 microns. Setting the insulating layer 2 can pr...

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Abstract

The invention discloses a two-dimensional hot-film wind speed and direction sensor, which comprises a substrate, an insulation layer, temperature measurement elements and a heat element, wherein a cavity is formed in the substrate, and the temperature measurement elements and the heat element are fixed on the upper surface of the insulation layer; and distances from the temperature measurement elements to the heat element are the same, opposite temperature measurement elements take the heat element as a center and are symmetric to each other, and distances of opposite end parts of adjacent temperature measurement elements are the same. The sensor has small power consumption in measuring wind speed and direction and high sensitivity. The invention also discloses a preparation method of the two-dimensional hot-film wind speed and direction sensor, which comprises the following steps: taking (100) crystal monocrystalline wafer as the substrate; preparing a cavity inside the wafer; forming an insulation layer on the upper surface of the oxide wafer; and sputtering metal on the upper surface of the insulation layer by adopting a magnetron sputtering method, and photoetching to form temperature measurement elements and the heat element. The sensor prepared by the preparation method, the cavity is formed in the substrate, so that the power consumption of the sensor in measuring wind speed and direction is reduced, and the measurement accuracy is ensured.

Description

technical field [0001] The invention relates to a wind speed and direction sensor and a preparation method thereof, in particular to a two-dimensional hot film wind speed and direction sensor and a preparation method thereof. Background technique [0002] Wind speed and wind direction are very important parameters to reflect meteorological conditions, and have an important impact on environmental monitoring, air conditioning, and industrial and agricultural production. Therefore, it is of great practical significance to quickly and accurately measure wind speed and wind direction. As we all know, although wind cups and wind vanes that are machined can also measure wind speed and wind direction, these mechanical devices are easy to wear due to moving parts, and have the disadvantages of large volume, high price, and frequent maintenance. The positions of the transmitting and detecting receiving heads of a typical ultrasonic wind speed sensor are fixed, so the relative structu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/10G01P13/02
Inventor 秦明项天彧陈升奇周麟黄庆安
Owner SOUTHEAST UNIV
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