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Device and method for selective etching of solar cells

A technology for solar cells and etching devices, which is applied in the manufacturing of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of large solution consumption, high equipment maintenance costs, and high requirements for spraying uniformity, and achieves good uniformity. , The effect of low maintenance cost and equipment procurement cost reduction

Active Publication Date: 2015-08-19
TRINA SOLAR CO LTD
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  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a device and method for selective etching of solar cells, which has good compatibility with existing processes, and can solve the problems of large solution consumption, high requirements for spraying uniformity, and high equipment maintenance costs.

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  • Device and method for selective etching of solar cells
  • Device and method for selective etching of solar cells
  • Device and method for selective etching of solar cells

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Embodiment Construction

[0037] The present invention will be further described below in conjunction with specific embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0038] refer to figure 1 , the solar cell sheet selective etching device of the present embodiment includes: a transfer roller 4; a coating roller 2 arranged above the transfer roller 4, the surface of the coating roller 2 is coated with a liquid absorbing layer 1, and the coating roller 2 The distance from the transport roller 4 is smaller than the thickness of the solar battery sheet 3 . The transport roller 4 rotates to transport the solar cell sheet 3 , and the liquid-absorbing layer 1 is squeezed to apply the absorbed etching solution to the upper surface of the solar cell sheet 3 . Wherein, a mask pattern is pre-formed on the upper surface of the solar battery sheet 3 . For selective etching of the emitter, the etchant can be 10% HF and 30% HNO 3 of the mixtur...

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Abstract

The invention provides a device and a method for selective etching of solar cells. The device for etching comprises transmission rolls and coating rolls arranged above the transmission rolls, the surfaces of the coating rolls are coated with liquid absorption layers, and the interval of the coating rolls and the transmission rolls is smaller than the thickness of a solar cell. The transmission rolls rotate to transfer the solar cell, and the liquid absorption layers are extruded to coat absorbed etching liquid onto the upper surface of the solar cell. The device and the method for selective etching of solar cells are well compatible to the existing process, and the problems of high solution consumption, high requirement on spraying uniformity, high equipment maintenance cost and the like can be solved.

Description

technical field [0001] The invention relates to a device and a method for selectively etching a solar cell, in particular to a device and a method for etching a selective emitter of a solar cell. Background technique [0002] In the formation process of the selective emitter of the solar cell, it is necessary to form a regional difference in surface sheet resistance on the front side of the cell. Among them, the metal electrode contact area requires a lower surface resistance to reduce the contact resistance of the electrode, while other areas require a higher surface resistance to improve the blue wave effect of the cell. [0003] In the prior art, usually after forming a mask pattern on the surface of the battery, the etching solution is sprayed onto the surface of the battery and the liquid is carried stably to selectively etch the surface of the battery. However, this process has many problems such as large solution consumption, high requirements for spraying uniformity...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/308
Inventor 祁宏山肖新民丁志强卫志敏
Owner TRINA SOLAR CO LTD
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