Electrorheological fluid-based flexible controllable air sac polishing tool

Abstract

The invention discloses an electrorheological fluid-based flexible controllable air sac polishing tool. The tool adopts a rigid cylindrical structure which is provided with a concave cavity and is opened at the lower end; the external upper part of the base is connected with a rotary shaft through a connection piece so as to obtain a driving force; a hollow air sac is adhered on the outer side wall of the base; two electrode plates, which are fixedly connected to the inner wall of the concave cavity in an insulation manner, are distributed in the shape of a Chinese character 'eight' and powered by a lead in the rotary shaft; the electrorheological fluid is filled in the hollow air sac; and the upper surface of a polished workpiece is arranged on and in tight fit with the surface of the hollow air sac. The polishing method is as follows: when the polishing layer is in tight contact with the upper surface of the workpiece, the electrode plates are not electrified, the electrorheological fluid is in a liquid state, so that the polishing layer can deform so as to be matched with the surface of the workpiece in shape; when the electrode plates are electrified, the electrorheological fluid is in a sticky or solid state rathe rather than the liquid state, so that the shape of the surface of the polishing layer is determined so as to realize the recording of the partial surface shape of the workpiece through the polishing layer, further, the surface precision in areas with constant polishing curvature radius is ensured, and the amount of material removal is controlled.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing, and specifically relates to an electrorheological flexible and controllable airbag polishing tool. Background technique [0002] Modern optical systems put forward extremely strict requirements on the surface quality of optical components. Weapons and equipment, space observation, laser nuclear fusion, extreme ultraviolet lithography, etc. not only require optical components to have extremely high surface accuracy, but also require full frequency band error distribution. Make strict controls. Compared with the traditional technology, the current computer-controlled optical surface shaping technology (CCOS) can greatly improve the processing efficiency, and has the advantages of simple equipment and low cost, and has gradually become the main method of processing aspheric surfaces. However, due to the inconsistency between the rigid small grinding head and the surface of the processe...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem of inconsistency with the surface of the workpiece and uneven force during the polishing of small abrasive tools, and effectively suppress the serious intermediate frequency error or waviness error caused by traditional rigid small abrasive tool polishing, the present invention provides an electrorheological fluid-based Flexible and controllable airbag polishing tool and method for realizing polishing

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