CVD single crystal diamond material

A single crystal diamond, beam technology, applied in the field of diamond materials, can solve problems such as uselessness

Active Publication Date: 2016-04-27
ELEMENT SIX LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this is a relatively simple design that does not require an optical cavity, in practice such a configuration is of little use due to the limited control of the output spectrum

Method used

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  • CVD single crystal diamond material
  • CVD single crystal diamond material
  • CVD single crystal diamond material

Examples

Experimental program
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Embodiment 1

[0132] Select a synthetic type 1b HPHT diamond plate with a pair of parallel principal faces approximately within 5° of (001). The sheet is fabricated as a square substrate suitable for the homoepitaxial synthesis of single crystal CVD diamond material by a process comprising the following steps:

[0133] i) Laser cut the substrate to produce a sheet with all edges;

[0134] ii) Grinding and polishing the major surface on which the growth occurred, the ground and polished portion having dimensions of about 6.0 mm x 6.0 mm 400 μm thick with all {100} planes. The level of defects at or below the substrate surface is minimized by careful substrate preparation as disclosed in EP1292726 and EP1290251. The level of defects introduced by the process can be revealed by the plasma etch using exposure. Substrates can be routinely prepared where the measurable defect density after exposure etching depends primarily on material quality and is below 5 × 10 3 mm -2 , and usuall...

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Abstract

Single crystal diamond material prepared using chemical vapor deposition (CVD) is disclosed, and in particular diamond material having properties suitable for use in optical applications such as in lasers. In particular, CVD single crystal diamond material is disclosed having preferred properties of longest inner dimension, birefringence and absorption coefficient when measured at room temperature. Also disclosed is the use of diamond material contained in a Raman laser and a method of making the diamond.

Description

technical field [0001] The present invention relates to single crystal diamond material prepared using chemical vapor deposition (CVD), and in particular to diamond material having properties suitable for use in optical applications such as lasers. Background technique [0002] Chemical Vapor Deposition (CVD) is a well-established technique for depositing materials onto substrates. This technique is extensively described in patents and other literature. For the deposition of diamond, CVD methods generally involve providing a gas mixture that decomposes to provide carbon and hydrogen. Decomposition of the source gas mixture can be induced by energy sources such as microwaves, radio frequency energy, flames, hot wires or jet based techniques. The reactive species is deposited onto a suitable substrate, typically maintained at 700°C to 1200°C, to form diamond. [0003] Minimizing the presence of defects within CVD diamond is of paramount importance for a number of applicatio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/04C23C16/27H01S3/30C30B25/02C30B25/16F16D65/06B60T1/06F16D69/04
CPCC23C16/27C23C16/277C30B25/02C30B25/16C30B29/04F16D69/0416F16D2069/0433F16D2069/0441F16D2069/045C01B32/25H01S3/30
Inventor I·弗里尔S·L·盖根D·J·特维切J·M·道德森
Owner ELEMENT SIX LTD
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