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Device and method for adjusting tilt of measured mirror in matching measurement of flat sub-aperture

A technology of splicing sub-apertures and mirrors under test, which is applied in the field of optical testing, can solve problems such as large fitting errors of tilt coefficients and poor splicing results, and achieve the effects of high precision, simple structure and algorithm

Inactive Publication Date: 2012-11-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

And the greater the inclination of the sub-aperture surface, the greater the fitting error of the inclination coefficient and the worse the splicing result

Method used

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  • Device and method for adjusting tilt of measured mirror in matching measurement of flat sub-aperture
  • Device and method for adjusting tilt of measured mirror in matching measurement of flat sub-aperture
  • Device and method for adjusting tilt of measured mirror in matching measurement of flat sub-aperture

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0031] figure 1 It is a schematic diagram of the device for adjusting the inclination of the measured part in the planar sub-aperture splicing measurement of the present invention, including a Fizeau phase-shifting interferometer 101, a standard mirror 102, a half-transparent mirror 103, a measured mirror 104, and a laser autocollimator 105 , a two-dimensional translation stage 106 , a tilt adjustment device 107 , a turntable 108 , a flat mirror 109 , a computer 110 , a detector 111 , and a focusing lens 112 . Wherein the center of the turntable 108, the two-dimensional translation stage 106, and the inclination adjustment device 107 has a light hole 113; the optical axis of the half-transparent mirror 103 and the Fizeau phase-shifting interferometer 101 forms an angle of 45 degrees, and the plane reflector 109 and The rotation axis of the tur...

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Abstract

The invention discloses a device and method for adjusting tilt of a measured mirror in matching measurement of a flat sub-aperture. The device comprises a fizeau phase-shifting interferometer, a standard mirror, a semi-transparent and semi-reflection mirror, a measured mirror, a laser autocollimator, a two-dimensional translation stage, a tilt adjusting device, a rotary table, a plane reflection mirror, a computer, a detector and a focusing lens. Levelling is carried out by using the device at the position of a first sub-aperture, and a parallel reference point of the measured mirror and the standard mirror is established, and then the gradient of the measured mirror is calculated based on the reference point at the position of the other sub-apertures, and finally, the posture of the measured mirror is adjusted so that the gradient of the sub-aperture surface is reduced and the accuracy of matching measurement of the flat sub-aperture is increased.

Description

technical field [0001] The invention belongs to the field of optical testing, and in particular relates to a device and a method for adjusting the inclination of a mirror under test in plane sub-aperture splicing measurement. Background technique [0002] The plane sub-aperture splicing measurement method divides the measured plane mirror into regions, then measures at different positions to obtain multiple sub-aperture surfaces, and then splices these sub-aperture surfaces with a certain overlapping area to realize the High-precision, high-spatial-resolution measurement of large-diameter surface shapes, while avoiding the disadvantages of difficult processing and high cost of large-diameter standard parts. [0003] The planar sub-aperture splicing measurement method is based on the principle of minimum phase error inconsistency in the overlapping area to first calculate the relative inclination and translation coefficients of each sub-aperture, and then compensate the incli...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 徐富超谢伟民贾辛邢廷文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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