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Measuring method for micro-lens array focal length based on Newton method and Talbot effect

A technology of a microlens array and a detection method, which is applied in the field of optical detection, can solve problems such as complex detection of focal image distance, and achieve the effects of low cost, simple operation and simple detection.

Inactive Publication Date: 2012-11-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

This method has high measurement accuracy, but it is more complicated to detect the focal length

Method used

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  • Measuring method for micro-lens array focal length based on Newton method and Talbot effect
  • Measuring method for micro-lens array focal length based on Newton method and Talbot effect
  • Measuring method for micro-lens array focal length based on Newton method and Talbot effect

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Embodiment Construction

[0049] like figure 1 , 2 As shown, it is the detection system schematic diagram of the inventive method, the outgoing light of monochromator 1 converges on star spot plate 3 through condenser lens 2, according to optical analysis, when star spot plate 3 is positioned at the focal point of measured microlens 4, The outgoing wavefront of the microlens 4 under test is a plane wavefront A, and due to the Taber effect of the Langki grating 5, the diffracted wavefront after the Langki grating 5 is:

[0050] U ( x , y , z ) = Ac 0 + Ac 1 exp ( jk λ p x ) exp ( j πzλ p 2 ...

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Abstract

A measuring method for micro-lens array focal length based on the Newton method and the Talbot effect belongs to the field of optical detection. The Talbot effect of Ronchi grating is utilized, Talbot self-imaging cycle with parallel light passing through the Ronchi grating is consistent to grating cycle, and a start point board is placed at a focus of object space of a micro-lens to be detected. The start point board is adjusted and focal object distance of the start point board is ensured by a micro-moving table. Out-of-focus of the start point board can be calculated according to changes of the Talbot self-imaging cycle of grating, and curvature radius of the micro-lens before the micro-lens exits spherical wave is image distance of imaging of the micro-lens. Measurement of focal length of the micro-lens can be achieved according to position relation of the image distance and focus image distance and by combining the Newton method. The measuring method is simple and easy to implement and has high measuring precision.

Description

technical field [0001] The invention relates to a method for detecting the focal length of a microlens based on the Newton method and the Taber effect, which belongs to the field of optical detection. The method is easy to operate and has high measurement accuracy. Background technique [0002] As an important part of micro optics and array diffractive optics, microlens and its array elements are widely used in beam wavefront detection, optical coupling and storage, Optical uniformity lighting, three-dimensional imaging and other technical fields. Similar to ordinary lenses, focal length is an important parameter for microlenses and their array elements. Although the detection methods of lens focal length are very rich, researchers are still looking for new detection methods to achieve high-precision measurement of the focal length of microlenses and their array elements. The focus detection methods of microlenses and their array elements are mainly divided into two catego...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 朱咸昌伍凡曹学东吴时彬
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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