Direct-driven XY table profile control method based on predictive control and cross coupling
A cross-coupling and predictive control technology, applied in digital control, electrical program control, etc., can solve problems such as PID lag, poor robustness, and increased control difficulty
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[0074] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0075] The structural block diagram of this embodiment is as follows figure 1 As shown, including: signal collector 1, position setter 2, predictive controller 3,
[0076] A cross-coupling controller 4 and a driver 5, wherein the cross-coupling controller 4 includes a contour error estimator 4-1 and a contour error compensator 4-2.
[0077] In this embodiment, the XY platform servo mechanism is used as the experimental equipment, the motor driver is set in the torque mode, and a system transfer function between an input command and an output position is first obtained by using system identification. Based on this transfer function, external disturbances and internal uncertainties are regarded as system disturbances, and the error caused by disturbances is compensated by a predictive controller in a single axis, and the response speed is improved through...
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