Electrode for a DBD plasma process

A technology of dielectric barrier discharge and plasma, which is applied in the field of electrodes and coating large pieces of glass, can solve the problems of different expansion coefficients, difficulty in manufacturing and use, and achieve the effect of large elongation

Active Publication Date: 2013-01-02
AGC GLASS EUROPE SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the materials (usually metals) of the dielectric and planar electrodes have often very different coefficients of expansion, making them difficult to manufacture and use

Method used

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  • Electrode for a DBD plasma process
  • Electrode for a DBD plasma process
  • Electrode for a DBD plasma process

Examples

Experimental program
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Embodiment Construction

[0049] The figures are not drawn to scale (in particular, thicknesses are exaggerated to facilitate understanding). Generally, similar elements are labeled with similar reference numerals in the drawings.

[0050] figure 1is a schematic diagram of an electrode of the present invention. Such an electrode 1 , which has been developed especially for the surface treatment and / or coating of large pieces of glass, can typically be close to four meters long and is therefore shown truncated.

[0051] Such an electrode 1 is usually installed facing another electrode, and due to the application of an ultra-high-voltage high-frequency electric field between these electrodes, a plasma is generated in the gap separating these two elements. The "working" part of the electrode, i.e. the part facing the second electrode 36, is shown here with a substantially planar surface 2 facing downwards ( Figure 4 ). One of the problems faced by those skilled in the art is the danger of sparks in io...

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Abstract

A planar electrode for the DBD plasma treatment of a surface comprises a metal casing (8) raised to a high voltage and provided with an active part (2) intended to be placed in parallel with a surface to be treated (27). This active part (2) is covered on the outside by a sheet (4) of dielectric material to which it is fixed by a polymer layer (6). The internal face of the active part (2) forms with the metal casing (8) a heat exchanger connected to a secondary cooling circuit (34) through which a refrigerant (10) circulates.

Description

technical field [0001] The present invention relates to a device (or device) comprising electrodes for use in the context of the treatment and / or preparation of surfaces by methods including dielectric barrier discharge (DBD), in particular for continuous production Case coated large pieces of glass. [0002] The invention also relates to a method of manufacturing such an electrode in the device and to such an electrode. Background technique [0003] The treatment of surfaces with plasma is known in particular in the field of the glass industry but also in the field of plastic films. It consists in generating a plasma between at least two electrodes, into which precursor species are injected such that reactants are produced by reaction and / or ionization which act on the surface to be treated. [0004] The problem is that the electrodes are subjected to very severe operating conditions: high temperature of the plasma; high reactivity of the injected and / or generated species...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32H05H1/24
CPCH01J37/3255H01J37/32724H05H1/24H01J37/32348H01J61/52
Inventor E·蒂克霍E·米歇尔J·勒克莱尔克
Owner AGC GLASS EUROPE SA
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