Mems resonator

A resonator, ring resonance technology, used in electrical components, impedance networks, etc.

Active Publication Date: 2013-01-09
NXP BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This results in substantial mechanical losses through the anchor, as the shuttle body constantly exerts asymmetric stress on the anchor during vibrations

Method used

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Embodiment Construction

[0058] The present invention provides a MEMS resonator wherein the resonator mass is anchored in a closed loop at points around the loop. A set of ring-comb electrode structures are fixed on the ring, e.g. at locations between the anchor points, to couple input (drive) and output (sense) signals to / from the resonator mass .

[0059] The resonator of the present invention has a ring-shaped frame shape, which may be a ring or a symmetrical polygonal ring, such as a square. The structure has an in-plane vibration mode shape in which segments of the structure bend alternately inwards and outwards, while the width of the structure remains substantially constant. Anchors are positioned on the nodes of the mode shape, ie on the boundaries between the partitions. At the nodal points (or quasi-nodal points), the material does not move significantly during vibration.

[0060] The structural material is a conductive material, such as doped monocrystalline silicon, doped polycrystallin...

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Abstract

A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to / from the resonator mass.

Description

technical field [0001] The present invention relates to MEMS resonators. Background technique [0002] MEMS resonators are expected to replace bulky and expensive quartz crystals in high-precision oscillators. The oscillators are widely used in timing and frequency reference applications such as real time clocks, RF modules in cell phones, devices containing Bluetooth modules, USB modules and other digital and telecommunication equipment. MEMS oscillators offer small size, low cost and potentially high levels of integration. Some initial MEMS oscillator products have recently been commercialized. [0003] A MEMS oscillator basically consists of a MEMS resonator and an external amplifier circuit. These two parts can exist in two separate dies in the same package, or can be integrated into the same die. The MEMS resonator consists of a silicon mass-spring system that can be excited into a mechanically resonant vibration and is meant to sense this vibration and convert it i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/24H03H9/125
CPCH03H9/2431
Inventor 金·范乐
Owner NXP BV
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