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Support and transport unit for a print substrate for a plant for depositing print tracks, and relative deposition method

A substrate and support plate technology, applied in printing, printing machines, optical mechanical equipment, etc., can solve problems such as substrate slurry leakage, wafer errors, and incorrect control

Inactive Publication Date: 2013-01-23
APPLIED MATERIALS ITALIA SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Frequent replacement of the breathable material may also cause frequent downtime for changing the straps, with attendant increased costs due to replaced straps
In addition, frequent changes of gas permeable materials may introduce the possibility of errors in placement and fabrication of subsequent wafers
[0011] Also, if the fluid power circuit performs the function of keeping the substrate attached to the printing nest and allowing the pores of the substrate to be filled, these two actions may not be properly controlled since the two functions require different operating pressures
This most of the time leads to uncontrolled filling of the holes of the substrate and unwanted leakage of the paste from the backside of the cell

Method used

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  • Support and transport unit for a print substrate for a plant for depositing print tracks, and relative deposition method
  • Support and transport unit for a print substrate for a plant for depositing print tracks, and relative deposition method
  • Support and transport unit for a print substrate for a plant for depositing print tracks, and relative deposition method

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Experimental program
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Embodiment Construction

[0054] refer to figure 1 , shows the layout of an apparatus 11 typically used to deposit printed traces on a print support or substrate 12 . In the embodiment shown here, the apparatus 11 comprises a processing unit 13 generally provided with an inlet conveyor 15 , a rotary actuator unit 16 , a screen printing head 19 and an outlet conveyor 20 . The entry and exit conveyors 15 and 20 are respectively adapted to move the substrate 12 towards and away from the rotary actuator unit 16 in the direction indicated by arrow F.

[0055] The rotary actuator unit 16 includes four supporting and conveying units 10 (also called printing nests) arranged angularly staggered with each other, and each of them can be in the first position "1", the second position "2", the third position " 3” and the fourth position “4”, wherein the first position “1” receives the substrate 12 from the inlet conveyor 15, the second position “2” is inside the screen printing head 19, the third position “3 ” pa...

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Abstract

A unit to support and transport a print substrate (12) for a plant (11) for depositing print tracks made of conductive or non-conductive material, said print substrate (12) being provided with holes (57) that extend between a first surface (55) and a second surface (56) thereof. Said support unit comprises a first fluid-dynamic circuit (32) suitable to generate a first suction condition to keep the substrate (12) adherent to a support surface (113) of the support unit, and a second fluid-dynamic circuit (33), distinct and at least partly independent from the first fluid-dynamic circuit (32), suitable to generate a second controlled suction condition able to allow the controlled filling of the holes (57) with the conductive or non-conductive material.

Description

technical field [0001] Aspects of the invention relate generally to methods and apparatus for depositing printing material on a substrate. Some embodiments presented herein relate to support and transport devices for printed substrates of an apparatus for depositing printed traces, eg in screen printing, inkjet printing, laser printing or other techniques. Embodiments may be used, for example, to fabricate photovoltaic cells by printing conductive traces using a multilayer pattern on a substrate, plate, or similar element such as a wafer, foil, or silicon-based object. Embodiments may also be used with printing support elements from other fields providing printing operations. Background technique [0002] Printing machines are known for the manufacture of solar cells, photovoltaic cells or similar semiconductor devices, which utilize cells, using a screen printing method, by means of suitable conductive materials or conductive pastes or contact pastes. Realize electronic c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41F17/00H01L21/677H01L21/687H01L21/67
CPCG03F7/70691G03F7/70708B29C43/003H01L21/67294H01L21/6875H01L21/68785B29C33/42H01J2237/332H01L21/68714B29C43/18G03F7/708G03F7/7075H01L21/6838B29C43/021G03F7/707G03F7/70925H05K13/02B41F15/08
Inventor 詹佛朗哥·帕斯奎林马科·加里亚左戴戈·唐尼瓦伦蒂娜·福林乔达诺·洛克乔治欧·塞勒里
Owner APPLIED MATERIALS ITALIA SRL