Automatic test system and method of electric micromirror

An automatic test system, electrothermal micromirror technology, applied in machine/structural component testing, optical instrument testing, optical performance testing, etc., can solve the problem of electrothermal micromirror without automatic test control system, etc., to achieve data storage and call Convenience, simple realization and high accuracy

Inactive Publication Date: 2013-02-06
WUXI WIO TECH
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AI Technical Summary

Problems solved by technology

[0004] Although there are some relatively mature automatic test control schemes in the field of microelectromechanical system micromirrors, there is no automatic test control system scheme in the field of electrothermal micromirrors, especially for small chips, low cost and high reliability.

Method used

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  • Automatic test system and method of electric micromirror
  • Automatic test system and method of electric micromirror
  • Automatic test system and method of electric micromirror

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Embodiment Construction

[0058] An automatic test system for an electrothermal micromirror, comprising an electric displacement platform, a needle for testing the electrothermal micromirror, a data acquisition system, and an optical path for an automatic test control system for the electrothermal micromirror.

[0059] like figure 1 The electric displacement platform is used for placing the bare core wafer of the electrothermal micromirror, and can drive the wafer to move in the directions of X, Y, and Z axes. The platform includes a base 8 , an X-axis displacement platform 6 , a Y-axis displacement platform 7 , and a Z-axis displacement platform 1 , and a micro camera 2 and a needle 3 are arranged on the Z-axis displacement platform 1 . Placed on the transparent bottom plate 5 on the X-axis displacement platform 6 of the electrothermal micromirror bare chip wafer, covered with a hollow cover plate 4. The electric displacement platform is arranged on the base 8 .

[0060] The needle of the electrothe...

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Abstract

The invention discloses an automatic test system of an electric micromirror, which comprises an electric displacement platform, a pinhead for an electric micromirror test, a data acquisition system, and an electric micromirror automatic test control system optical path. The automatic test method of the electric micromirror comprises the steps of test of the electric micromirror yield, aging test and optical scanning test of the electric micromirror, test of the electric micromirror attribute. With the test system and method, the yield and the attribute of the micromirror can be automatically tested.

Description

technical field [0001] The invention relates to an automatic testing system and method for an electrothermal micromirror. Background technique [0002] Micro-electro-mechanical systems (MEMS for short) is a three-dimensional device manufactured by micro-machining technology, including at least one movable structure to satisfy a certain mechanical action. MEMS devices are used in many different fields because they borrow the technology of integrated circuits. More and more sensors and actuators in this century tend to adopt MEMS technology, among which microelectromechanical system micromirrors are an excellent example. The force generated by the MEMS-actuated structure is small but sufficient to drive the deflection of the mirror. Among the many MEMS micromirrors, the electrothermal micromirror is a microelectromechanical system that deflects the mirror by thermal deformation. The electrothermal micromirror system mainly includes three parts: the mirror surface, the suppo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00G01M11/02G01R27/02G01R31/00
Inventor 兰树明谢会开陈巧管帅王东琳傅霖来周亮
Owner WUXI WIO TECH
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