Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles

Abstract

The invention discloses a method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles, and belongs to the field of measurement. Devices adopted in the method include a vacuum valve, an ionization gauge, a vacuum chamber, a vacuum pump group and a quadrupole mass spectrograph, wherein the vacuum valve, the ionization gauge, the vacuum pump group and the quadrupole mass spectrograph are respectively connected with the vacuum chamber; the quadrupole mass spectrograph is capable of separating electron excitation desorption ions and gas-phase ions and an energy analyzer is installed between an ion source and a quadrupole rod; the vacuum valve is of a full metal structure; and the lower measurement limit of the ionization gauge is 10-10Pa magnitude. By utilizing the method, the problem that in the full-pressure measurement, the ionization gauge and the like can effectively separate ESD ions and gas phase ions but cannot discriminate ions generated from ESD neutral particles doped in the gas phase ions is solved; the error in polar altitude vacuum measurement is reduced; and the lower limit in accurate measurement is extended.

Description

technical field [0001] The invention relates to an extremely high vacuum measurement method for reducing the error of electron stimulated desorption (ESD) neutral particles, especially the ultrahigh / extremely high vacuum system realized by adopting a quadrupole mass spectrometer with an energy analyzer structure The invention relates to a method for measuring vacuum degree, which belongs to the field of measurement. Background technique [0002] The ESD effect on the grid surface of the hot cathode ionization gauge will generate ESD ions and ESD neutral particles, and the ESD ions and gas phase ions have an energy difference. The document "Development of Extremely High Vacuum Technology, "Aerospace Measuring Technology" Volume 29, Issue 5, 2009, Page 71-76", introduces a variety of effective separation of ESD ions, reducing the limiting factors of extremely high vacuum measurement That is, the extremely high vacuum ionization gauge of ESD effect. The literature pointed out...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a very high vacuum measurement method that reduces the error of electronically excited desorption neutral particles. The method solves the problem that the separation gauge in the full pressure measurement can effectively separate ESD ions and gas phase ions, but cannot distinguish gas phase ions. The problem of ion generation from doped ESD neutral particles; reduces the error of extremely high vacuum measurement and extends the lower limit of accurate measurement

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