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Composite cavity of excimer laser

An excimer laser and composite cavity technology, applied in the field of lasers, achieves the effects of convenient tuning, easy processing, and simple structure

Inactive Publication Date: 2013-03-13
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This requires the excimer laser to achieve narrow linewidth and high energy output at the same time. However, using the combination of previous lasers and linewidth narrowing modules, the output of narrow linewidth is at the cost of laser energy loss.

Method used

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  • Composite cavity of excimer laser
  • Composite cavity of excimer laser
  • Composite cavity of excimer laser

Examples

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no. 1 example

[0028] figure 1 A schematic structural view of the first embodiment of the present invention is shown. This first embodiment is an excimer laser recombination cavity. Such as figure 1 As shown, the composite cavity includes an excimer laser discharge cavity 1 , an output coupling mirror 2 , a prism 3 , a reflection mirror 4 and a grating 5 . Wherein, the output coupling mirror 2 constitutes the aforementioned laser output module, the prism 3 and the grating 5 constitute the aforementioned line width narrowing module, and the reflector 4 constitutes the aforementioned laser amplification module.

[0029] Excimer laser refers to the laser light produced by excited dimer. When the inert gas and the halogen gas are mixed together in a certain proportion and pressure, the gas atoms will transition from the ground state to the excited state under the action of the excitation source, and even be ionized. Atoms or ions in an excited state can easily combine into molecules whose li...

no. 2 example

[0040] The overall structure of the second embodiment is the same as that of the first embodiment, except that the second embodiment uses a prism group instead of the single prism 3 in the first embodiment. That is to say, the line width narrowing module in the composite cavity of the second embodiment is different from that of the first embodiment.

[0041] figure 2 It is a structural schematic diagram of the line width narrowing module in the second embodiment of the excimer laser composite cavity of the present invention. Such as figure 2 As shown, the prism group is composed of a plurality of right-angle prisms 31, 32, 33 arranged in sequence. The prism 31 receives the laser light emitted from the laser discharge cavity 1 from the hypotenuse and emits it from the right-angle side; the prism 32 receives the laser light emitted from the prism 31 from the hypotenuse. , emitted from the right-angle side, the prism 33 receives the laser light emitted from the prism 32 from ...

no. 3 example

[0045] image 3 It is a structural schematic diagram of the third embodiment of the excimer laser composite cavity of the present invention. Such as image 3 As shown, the basic structure of the third embodiment is also the same as that of the first embodiment, the difference is that an etalon 6 is added in the amplifying cavity. The so-called etalon is a dispersion element made of the principle of multi-beam interference. In the field of optical technology, the Fabry-Pérot interferometer is a multi-beam interferometer consisting of two parallel glass plates, where the opposite inner surfaces of the two glass plates have high reflectivity . A Fabry-Perot interferometer is also often called a Fabry-Perot resonator, and when two glass plates are spaced by a hollow spacer of fixed length, it is also called a Fabry-Perot cavity. Luo etalon, or directly referred to as etalon.

[0046] Such as image 3 As shown, in this embodiment, the line width narrowing module includes a si...

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Abstract

The invention discloses a composite cavity of an excimer laser. The composite cavity comprises a laser discharge cavity, a laser output module, a line width narrowing module and a laser amplification module, wherein the laser discharge cavity internally comprises work gas which can produce laser under the action of an excitation source, and the laser discharge cavity, the laser output module and the line width narrowing module constitute a line width narrowing cavity which is used for carrying out line width narrowing on laser produced by the work gas; and the laser discharge cavity, the laser output module and the laser amplification module constitute an amplification cavity which is used for carrying out energy amplification on laser subjected to line width narrowing. According to the invention, not only can the narrow-line-width output of the excimer laser be realized, but also the energy and stability of the output laser can be improved through the composite cavity design, and meanwhile, the composite cavity disclosed by the invention is simple in structure and convenient to process and tune.

Description

technical field [0001] The invention belongs to the technical field of lasers, in particular to an excimer laser compound cavity, in particular to an excimer laser compound cavity with narrow line width and high energy output. Background technique [0002] With the development of the semiconductor industry and the continuous progress of large-scale integrated circuits, the requirements for lithography technology are getting higher and higher. Excimer lasers as light sources for lithography play a key role in the improvement of lithography technology. This requires the excimer laser to achieve narrow linewidth and high energy output at the same time. However, using the combination of previous lasers and linewidth narrowing modules, the output of narrow linewidth is at the cost of laser energy loss. Therefore, in order to obtain narrow linewidth and high energy output at the same time, it is necessary to design a mechanism to tune the energy and linewidth of the laser to obtai...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/08H01S3/10
Inventor 周翊单耀莹范元媛宋兴亮张立佳崔惠绒王宇
Owner RAINBOW SOURCE LASER RSLASER
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