No-diffusion-pump type coating machine for composite films

A composite film and coating machine technology, applied in the field of heating, can solve problems such as difficulties and high costs, and achieve the effects of good vacuuming effect, light weight and reduced energy consumption

Inactive Publication Date: 2013-03-27
SHANGHAI HONGHAO ENTERPRISE DEV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the matrix film is very thin and very fragile, it is easy to cause the matrix film to tear after the feeding speed of these rotating parts is wrong
[0006] It is very difficult to precise

Method used

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  • No-diffusion-pump type coating machine for composite films
  • No-diffusion-pump type coating machine for composite films
  • No-diffusion-pump type coating machine for composite films

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Embodiment Construction

[0063] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific diagrams.

[0064] refer to figure 1 , Non-diffusion pump type composite film coating machine, including a vacuum system, a coating chamber, the vacuum system is connected to the coating chamber to draw a vacuum for the coating chamber, the vacuum system is equipped with a vacuum pump system, and the vacuum pump adopts a Roots pump system. Compared with the traditional diffusion pump, the Roots pump has the advantages of low energy consumption, stable performance, good vacuuming effect, and instant start. It helps to improve the performance stability of the entire non-diffusion pump composite film coating machine, improve the coating quality, and greatly reduce energy consumption.

[0065] The Roots pump system adopts a high-vacuum multi-stage Roots pump system...

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Abstract

The invention relates to the technical field of heating and in particular relates to vacuum coating equipment. A no-diffusion-pump type coating machine for composite films comprises a vacuum-pumping system and a coating chamber, wherein the vacuum-pumping system is connected with the coating chamber for carrying out vacuum-pumping on the coating chamber; a vacuum pump system is arranged in the vacuum -pumping system; and the vacuum pump adopts a lobe pump system. Compared with a conventional diffusion pump, the lobe pump has advantages of low energy consumption, stable performances, a good vacuum-pumping effect, instant starting and the like, is beneficial to improving the performable stability of the no-diffusion-pump type coating machine for composite films, and the coating quality, and greatly reducing energy consumption. The lobe pump system adopts a high-vacuum multi-stage lobe system which is formed by connecting at least two lobe systems stage by stage.

Description

technical field [0001] The invention relates to the technical field of heating, in particular to a vacuum coating machine. Background technique [0002] In the roll-to-roll vacuum coating machine, there are feed rolls, cooling rolls, and flattening rolls. The feed roll is loaded with a roll of substrate film. The base film on the base film roll passes around the cooling drum and the flattening roll in turn. The base film is flattened by a flattening roller, and after the flattening, the metal vapor is evaporated onto the base film through an evaporation source to complete the coating operation. [0003] In the coating work, there are at least feeding rollers, cooling rollers, and flattening rollers, and the three rotating parts need to work precisely together. Because the base film is very thin and very fragile, it is easy to cause the base film to tear when the feeding speed of these rotating parts is wrong. It is very difficult to precisely control the feeding speed of...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/56
Inventor 陈生贩陈显东江裕捺陈生镇陈发杰
Owner SHANGHAI HONGHAO ENTERPRISE DEV
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