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834results about How to "Improve performance and stability" patented technology

Chip-based advanced modulation format transmitter

In various embodiments, a monolithic integrated transmitter, comprising an on-chip laser source and a modulator structure capable of generating advanced modulation format signals based on amplitude and phase modulation are described.
Owner:FREEDOM PHOTONICS LLC

Dual-band multilayer bandpass filter

PCT No. PCT / JP97 / 02660 Sec. 371 Date Jan. 20, 1999 Sec. 102(e) Date Jan. 20, 1999 PCT Filed Jul. 31, 1997 PCT Pub. No. WO98 / 05120 PCT Pub. Date Feb. 5, 1998A dual-band multilayer bandpass filter having a first filter unit (18) for filtering a first signal having a first frequency and a second filter unit (19) for filtering a second signal having a second frequency. First and second filter units are arranged in stacked ceramic layers. A first blocking element (20a, 20b; 25a, 25b; 25a', 25b'; 46a, 46b) is coupled to the first filter unit (18) for blocking the second signal from being applied to the first filter unit (18). A second blocking element (21a, 21b; 26a, 26b; 25c, 25d; 27a, 27b) is coupled to the second filter unit (19) for blocking the first signal from being applied to the second filter unit (19).
Owner:PANASONIC CORP

Control systems with normalized and covariance adaptation by optimal control modification

Disclosed is a novel adaptive control method and system called optimal control modification with normalization and covariance adjustment. The invention addresses specifically to current challenges with adaptive control in these areas: 1) persistent excitation, 2) complex nonlinear input-output mapping, 3) large inputs and persistent learning, and 4) the lack of stability analysis tools for certification. The invention has been subject to many simulations and flight testing. The results substantiate the effectiveness of the invention and demonstrate the technical feasibility for use in modern aircraft flight control systems.
Owner:NASA

Air conditioning system

In an air conditioning system, a first expansion device and a second expansion device playing a different role from each other are controlled in a different control method suitable for each role, thereby improving the performance and stability of the system. Furthermore, the control method for the first expansion device is differentiated according to the operation state of the air conditioning system, thereby improving the stability of the system. Furthermore, the intermediate pressure can be adjusted more rapidly and precisely according to the state of the air conditioning system by differentiating the control method for the first expansion device for adjusting the intermediate pressure depending on the degree of superheat of the refrigerant, thereby improving the stability and performance of the system. Furthermore, the first expansion device is gradually opened by controlling such that a change in opening degree may change according to the opening time of the first expansion device, thereby improving the stability of the system and achieving more stable switching of the control method for the first expansion device.
Owner:LG ELECTRONICS INC

Binder composition for electrode of nonaqueous electrolyte battery, and electrode mixture, electrode and battery using same

By using a composition comprising at least a vinylidene fluoride polymer containing a functional group and a polar polymer containing a hydroxyl group and / or a carbonyl group in the molecule as a binder for an electrode (positive electrode / or negative electrode) active material, the nonaqueous electrolysis can be maintained. The necessary high capacity of the liquid battery, and at the same time improve the stability of its performance and the safety of internal short circuit.
Owner:KUREHA KAGAKU KOGYO KK

Low-pressure diffusion technology for crystalline silicon cell

The invention discloses a low-pressure diffusion technology for a crystalline silicon cell. The technology comprises the following steps: (1) a high-temperature oxidation before diffusion; (2) a low-pressure diffusion, namely preparing a PN knot by a sub-step diffusion method; and (3) annealing, namely changing internal pressure to remove impurities. According to the low-pressure diffusion technology, the uniformity between diffusion sheets can be improved; the temperature of a temperature zone in a fire hole is lowered, namely the temperature uniformity of various temperature zones of a diffusion tube is improved; the problem of a great fluctuation of sheet resistance of the fire hole of a diffusion furnace is solved; the service lifetime of a vacuum pump is prolonged; and the production cost of a diffusion procedure is reduced.
Owner:HUNAN RED SUN PHOTOELECTRICITY SCI & TECH

Perovskite film photovoltaic cell based on SnO2 and preparation method thereof

The invention relates to a perovskite film photovoltaic cell based on SnO2 and a preparation method thereof. The perovskite film photovoltaic cell utilizes a SnO2 film, which can be prepared in low temperature, as an electron transmission layer to replace a conventional TiO2 electron transmission layer prepared through high-temperature sintering. The perovskite film photovoltaic cell based on the SnO2 electron transmission layer prepared at low temperature realizes 14.60% high photoelectric conversion efficiency, so that the perovskite film photovoltaic cell based on the SnO2 is far better than the conventional perovskite film photovoltaic cell based on the TiO2 electron transmission layer prepared through high-temperature sintering. The chemical property of the SnO2 film is stable and the preparation process is simple; the preparation process of the perovskite cell is greatly simplified, the fabricating cost of the cell is effectively reduced, and the stability of the perovskite film photovoltaic cell performance can also be improved very well.
Owner:WUHAN UNIV

Fuel cell system and operation method thereof

A fuel cell system capable of improving performance and stability of the system by using stack off-gas includes: a power generation unit that generates power through an electrochemical reaction of a first fuel and a first oxidant; a reforming unit that supplies the first fuel to the power generation unit; a heating unit that receives second fuel and a second oxidant, combusts the second fuel, and is thermal-conductively coupled with the reforming unit; and a connection unit that connects the heating unit with the power generation unit to be in fluid communication and supplies off-gas of the power generation unit to the heating unit. The off-gas is supplied to the heating unit in a pulse type.
Owner:SAMSUNG SDI CO LTD

Electrochromic device and preparation method and application thereof

The invention discloses an electrochromic device and a preparation method and application thereof. The preparation method comprises the following steps: depositing a first conductive layer on the surface of a first substrate by adopting a coating process; depositing a first electrochromic layer on a mask on the surface of the first conductive layer; sequentially depositing an electrolyte layer and a second conductive layer on the surface of the first electrochromic layer by adopting a coating process; or preparing an electrolyte layer between the second conductive layer and the first electrochromic layer after the second conductive layer is deposited on the surface of a second substrate; obtaining a single-layer electrochromic device; or, sequentially depositing an electrolyte layer, a second electrochromic layer and a second conductive layer on the surface of the first electrochromic layer by adopting a coating process; or sequentially depositing the second conductive layer and the second electrochromic layer on the surface of the second substrate, and preparing the electrolyte layer between the second electrochromic layer and the first electrochromic layer; thereby obtaining a double-layer electrochromic device, wherein the electrolyte layer is a transparent solid-state organic lithium ion conductor film. According to the all-solid-state preparation process, the problem that large-area scale production is difficult to realize is effectively solved.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI +1

Method for improving teflon adhesive property and method for producing pressure-sensitive adhesive tape

ActiveCN103421200AGood adhesionAdded cleaning stepsFilm/foil adhesivesPolymer scienceAdhesive
The invention discloses a method for improving a teflon adhesive property. The method comprises the following steps of washing, wherein at least one kind of methyl alcohol, methyl alcohol, isopropanol, acetone and methylbenzene is adopted, and teflon base materials are washed through ultrasonic oscillation; normal-pressure low-temperature plasma processing, wherein a normal-pressure low-temperature plasma technology based on barometric pressure glow is used for carrying out the normal-pressure low-temperature plasma processing on the washed teflon base materials. The invention further discloses a method for producing pressure-sensitive adhesive tape. The method for improving the teflon adhesive property has the advantages that the adhesive property of the teflon base materials can be effectively improved, the contact angle of the surfaces of the processed materials is 86 degrees, and the adhesive strength is larger than 5.0MPa.
Owner:成都同明创新科技有限公司

Chip-based advanced modulation format transmitter

In various embodiments, a monolithic integrated transmitter, comprising an on-chip laser source and a modulator structure capable of generating advanced modulation format signals based on amplitude and phase modulation are described.
Owner:FREEDOM PHOTONICS LLC

Method for detecting quality of inner wall of via hole of PCB

The invention provides a method for detecting the quality of the inner wall of a via hole of a PCB. The method includes the steps that step101, the PCB to be detected and a standard template are acquired; step102, an original image of the PCB to be detected and an original image of the standard template are collected through a terahertz wave imaging technology; step103, thresholding and denoising are performed on the original image of the PCB to be detected and the original image of the standard template to obtain a recovered image to be detected and a recovered image of the standard template; step104, characteristic functions of the recovered images are calculated to obtain the circle center and diameter information of the via hole; step105, template matching operation is performed on the characteristic information of the recovered image of the standard template and the characteristic information of the recovered image to be detected; step106, if the matching operation result is within a production permissible error range, it is displayed that the PCB is detected to be qualified; step107, if the matching operation result is beyond the production permissible error range, it is displayed that the PCB is detected to be unqualified. By means of the method, the quality of the inner wall of the via hole is effectively detected, and the product quality of the PCB is guaranteed.
Owner:ZHEJIANG OULONG ELECTRIC

Mesoscopic perovskite photovoltaic cell with tin-oxide electron-transporting layer and preparation method thereof

The invention relates to a perovskite photovoltaic cell with bilayer nanometer mesoporous electron-transporting layer and preparation method thereof. The cell comprises a conducting substrate, an electron-transporting layer with double-layer structure, a perovskite light absorption layer, a hole-transporting layer and metal electrodes. The perovskite photovoltaic cell with bilayer nanometer mesoporous electron-transporting layer has the advantages that the SnO2 with one step method low-temperature growth, is used as the electron-transporting layer in the photovoltaic cell, replaces the TiO2 electron-transporting layer with two steps method high temperature sintering, and the preparation process is simplified. The mesoporous perovskite photovoltaic cell prepared with one step low-temperature growth method obtains 13.82% of highlight electricity transfer efficiency, and reduces the manufacturing cost effectively at the same time. Compared with a planer construction, the mesoporous structure used in the perovskite photovoltaic cell is liable for the adherence of the perovskite light absorption material. SnO2 conducts a smaller dissimilation on the perovskite light absorption layer than the TiO2 does, the performance and stability of the cell are improved in this way. The perovskite photovoltaic cell with bilayer nanometer mesoporous electron-transporting layer and preparation method thereof plays a great promoting role in the development and popularization on the flexible solar cell, and further promotes the industrialized application on the perovskite solar cell.
Owner:WUHAN UNIV

Native layer crash tracing method and apparatus for Android system, storage medium and terminal

The invention relates to the field of software maintenance, in particular to a Native layer crash tracing method and apparatus for an Android system, a storage medium and a terminal. The method comprises the steps of capturing a signal event of Native layer crash of an application, and detecting whether the signal event is registered by the application or not; if the signal event is registered bythe application, calling a processing function corresponding to the signal event and preset by an application process, and executing the processing function: calling a function interface of a Java layer in a Native layer, and obtaining a JNIEnv variable of a thread receiving the signal event; calling a FindClass function through the JNIEnv variable to obtain Java classes; reflectively calling a getStackTrace function to obtain call stack information of the Java classes, thereby obtaining all information of a call stack of the whole Java layer; and according to all the information of the call stack of the whole Java layer, tracing reasons for the Native layer crash. The problem that the reasons for the Native layer crash in the Android system cannot be traced well at present is solved.
Owner:GUANGZHOU HUADUO NETWORK TECH

Alcohol amine-carboxylic acid polymer as well as preparation method and application thereof

InactiveCN103193936AGood compatibilityHas steric hindrancePolymer scienceAlcohol
The invention discloses an alcohol amine-carboxylic acid polymer. The molecular structural formula of the principal component of the alcohol amine-carboxylic acid polymer is as follows: a,b=2-20, and n=20-60. The invention also provides a method for preparing the alcohol amine-carboxylic acid polymer and an application thereof as a cement grinding aid. The alcohol amine-carboxylic acid polymer disclosed by the invention can improve the consistency of cement and a water-reducing agent as the cement grinding aid and has the advantages of outstanding grind aiding effect, excellent general effect, stability in property, low cost, small effective mixing amount and wide application prospect.
Owner:CHINA UNIV OF MINING & TECH (BEIJING)

Nondestructive testing robot intelligent testing method based on virtual reality technology

The invention discloses a nondestructive testing robot intelligent testing method based on a virtual reality technology. The method comprises the following steps: (1) a nondestructive testing robot for nondestructive testing is mounted at a predetermined position in a to-be-tested reactor pressure vessel; (2) freedom degree kinematic axes of the nondestructive testing robot are each restored to an initial state, then the freedom degree kinematic axes are each subjected to position calibration, and a global coordinate system and axis coordinate systems of the freedom degree kinematic axes are constructed; (3) corresponding relationships are established between simulation models and real devices; and (4) the simulation model of the nondestructive testing robot performs position attitude transformation, virtually displays and controls synchronous movement of the nondestructive test robot to perform nondestructive testing in a three-dimensional virtual environment according to real-timely acquired position attitude information feedback values of the freedom degree kinematic axes of the nondestructive testing robot. The method realizes the omni-directional three-dimensional WYSIWYG display control mode, greatly improves the security of on-site project implementation, and improves the project implementation efficiency.
Owner:CGNPC INSPECTION TECH +3

Tissue engineering cartilage and preparation method thereof

ActiveCN102526806AIncrease cell densityCell viability and microenvironment are goodBone implantTissue engineeringNormal cartilage
The invention discloses a tissue engineering cartilage and a preparation method thereof. The tissue engineering cartilage is cytoactive, consists of sequentially laminated cell patches including a surface layer, a middle layer, a deep layer and a calcified layer, and takes collagen matrix as a main component; the layers are compounded by collagen and hyaluronic acid, and the bordering integration of various layers of cartilage structures is promoted through hydrostatic culture; and the tissue engineering cartilage is prepared by preparing various layers of cartilage cell patches and assembling multiple structural layers. The prepared tissue engineering cartilage is in a layering arrangement of a natural cartilage, has a very good tissue structure and very good mechanical properties (frictional coefficient is 75-85 percent that of a natural cartilage tissue, and the elastic modulus is 80-90 percent that of the natural cartilage tissue.); the integration between different layers is good; experiments prove that the prepared tissue engineering cartilage can form the tidal line same as that of a normal cartilage tissue and has the same layering structure; and the prepared tissue engineering cartilage is capable of promoting regeneration and function recovery of a cartilage and obviously shortening the cycle of cartilage damage treatment and is applicable to cartilage defect restoration for a load-bearing part of a articular cartilage.
Owner:SHAANXI BIO REGENERATIVE MEDICINE CO LTD

Production method of meta-aramid fiber paper-based material

The invention discloses a production method of a meta-aramid fiber paper-based material. The production method includes the following steps that functional powder is added into a polyisophthaloyl metaphenylene diamine solution to obtain a uniform mixed stock solution, and meta-aramid chopped fiber is prepared through a dry spinning method; meta-aramid fibrid is prepared from the polyisophthaloyl metaphenylene diamine solution; the meta-aramid fibrid is screened in a multi-level mode, and fiber with suitable mesh numbers are selected and combined by the ratio; aramid fiber is mixed and defibered uniformly and is formed by adopting an ultralow-concentration inclined wire forming machine through ultrasonic wave treatment in a wet process papermaking mode, aramid raw paper is obtained through squeezing and drying, and surface coating is carried out on the raw paper; multi-section calendaring and rewinding cutting are carried out to prepare the high-performance aramid paper-based material. The meta-aramid paper-based material with the thickness of 1.5-30 mil can be prepared and is high in whiteness, excellent in mechanical strength, dielectric property, ageing resistance and flame retardance and high in performance stability, and the surface is smooth and even.
Owner:YANTAI METASTAR SPECIAL PAPER

SnO2 porous structure perovskite photovoltaic cell and preparation method thereof

The invention relates to an SnO2 porous structure perovskite photovoltaic cell and a preparation method thereof, which belong to the field of photoelectric materials and devices. An electron-transporting layer of the perovskite photovoltaic cell is a tin oxide compact layer covering above a transparent conducting substrate and a tin oxide porous layer covering above a tin oxide compact layer film. The porous structure SnO2 perovskite porous photovoltaic cell prepared based on a low temperature obtains 12.58 percent of high photoelectric conversion efficiency, which is higher than a plane structure perovskite film photovoltaic cell adopting an SnO2 compact layer as an electron-transporting layer. The oxide SnO2 is acid and alkali resistant, large in band gap width, and low in ultraviolet attenuation as a cell window layer, and has significance on improving the stability of performances of devices; in addition, the preparation method is simple in process, low in cost, and beneficial to scale production, and has wide business application prospect.
Owner:WUHAN UNIV

Hard sealing soluble bridge plug

PendingCN110792408AImprove the efficiency of fracturing operationsCompact structureSealing/packingEngineeringMechanical engineering
The invention relates to a hard sealing soluble bridge plug which comprises a body made of soluble metal. The body comprises a cone body, a slip and a guiding shoe which are connected from top to bottom; at least one metal sealing ring is arranged in a connecting position of the periphery of the cone body and the slip in a sleeving way; and the metal sealing ring is made of soluble metal. The hardsealing soluble bridge plug provided by the invention is applied to the field of fracturing yield increase operation of an oil gas well, so that the hard sealing soluble bridge plug can be more simply and conveniently stored, more stably sealed, and more firmly anchored; the setting success rate of the hard sealing soluble bridge plug is effectively improved; and the hard sealing soluble bridge plug better adapts to underground environment. In addition, the structure is simple and compact, and the processing and the manufacturing are easy, so that the cost of the soluble bridge plug is effectively reduced.
Owner:PETRO KING ENERGY TECH HUIZHOU CO LTD

Air conditioning system

An air conditioning system can improve the cooling / heating performance of the system because the injection of refrigerant into the compressor is achieved. The air conditioning system can further improve the cooling / heating performance in a low temperature region by injecting refrigerant as a two-phase refrigerant or a superheated vapor state into the compressor. The air conditioning system can prevent damage of the compressor and further improve reliability by controlling such that the ratio of a liquid refrigerant in the refrigerant injected into the compressor may be less than a set value.
Owner:LG ELECTRONICS INC

Self-limiting temperature electrothermal membrane of PTC high-molecular conductive fiber and preparation method thereof

ActiveCN102307403ANot easy to formThe coefficient of thermal expansion is roughly equivalent toWoven fabricsHeating element materialsFiberSelf limiting
The invention relates to a self-limiting temperature electrothermal membrane of a high-molecular conductive fiber with a positive temperature coefficient (PTC). The electrothermal membrane comprises a first insulating layer, a second insulating layer and a high-molecular PTC conductive braid layer, wherein the high-molecular PTC conductive braid layer consists of a braid lower layer, a plurality of polyvinyl PTC conductive fibers with carbon black filled type and two current carrying strips. The polyvinyl PTC conductive fiber with carbon black filled type is composed of the following raw materials: a polyethylene resin, an ethylene-vinyl acetate copolymer, carbon black and a carbon fiber and the like. The electrothermal membrane has advantages of stable electrothermal function and good flame retardant property. The preparation method comprises the following steps: preparing polyvinyl PTC conductive fibers with carbon black filled type; preparing a high-molecular PTC conductive braid layer; and carrying out calendaring moulding on a first insulating layer, a second insulating layer and the high-molecular PTC conductive braid layer. The method has advantages of simple process flow, low cost and easy realization.
Owner:XIAN GAIWO THERMAL ENERGY TECH

Cellulose/layered boron nitride high-dielectric nano-composite film and preparation method thereof

ActiveCN108610512AGive full play to plasticityExcellent dielectric propertiesCelluloseDielectric
The invention relates to a cellulose / layered boron nitride high-dielectric nano-composite film and preparation method of the cellulose / layered boron nitride high-dielectric nano-composite film. The cellulose / layered boron nitride high-dielectric nano-composite film has an obvious layered structure and comprises cellulose and boron nitride nanosheet layers uniformly dispersed in the cellulose. Thepreparation comprises the following steps: 1) preparing a boron nitride peeling layer dispersion liquid; 2) preparing a cellulose / boron nitride composite liquid: cooling the boron nitride peeling layer dispersion liquid obtained in the step 1) to below 0 DEG C, adding the cellulose according to the mass ratio of the boron nitride and the cellulose of (5: 95) to (15: 85), rapidly stirring and dissolving, performing centrifugation to remove impurities, thereby obtaining the cellulose / boron nitride composite liquid; 3) carrying out film formation on the prepared cellulose / boron nitride compositeliquid prepared in the step 2) in a coagulation bath to obtain the cellulose / layered boron nitride high-dielectric nano-composite film. The composite material provided by the invention has the layeredstructure and very high dielectric properties and high thermal conductivity (the breakdown voltage reaches 300 to 450 MVm<-1>, and the energy storage density is as high as 4 Jcm<-3> about, the thermal conductivity is about 2Wm<-1>K<-1>), and the cellulose / layered boron nitride high-dielectric nano-composite film has broad application prospects in the field of photovoltaic energy storage materials.
Owner:WUHAN UNIV OF TECH

Novel disc type oxygen sensor and preparation method and detection method thereof

The invention relates to a novel disc type oxygen sensor and a preparation method and a detection method thereof. The sensor is formed by sequentially superposing an upper protection layer, a signal layer, an air reference channel layer and a heating layer from top to bottom and then sintering, wherein the air reference channel layer comprises a tape casting substrate as the fifth layer, a tape casting substrate as the sixth layer and a tape casting substrate as the seventh layer, and an air reference channel with a closed end is arranged on the surface of the tape casting substrate as the fifth layer and is totally filled with a volatile piece; the preparation method comprises the steps of preparation of a plurality of tape casting slurry, tape casting forming, edge removing and cutting, hole punching, printing, filling, superposition, vacuum sealing, warm isostatic pressing, cutting, sintering and detection. The novel disc type oxygen sensor and the preparation method and the detection method thereof have the advantages that the oxygen sensor is simple in technology and stable in performance, has high adaptability, and can work stably in high temperature.
Owner:莱鼎电子材料科技有限公司

Process for improving rare-earth high-strength steel impact toughness

The invention discloses a process for improving rare-earth high-strength steel impact toughness. The process comprises the following steps of KR desulfurization slagging off, converter smelting, LF refining, RH refining and rare-earth treating, continuous casting, heating, rolling, accelerated cooling and heat treating. According to the process, aiming at the influence on the microstructure of low-alloy high-strength steel in the case that rare-earth exists, a research shows that rare-earth cerium Ce can improve the forms of inclusions and purify grain boundaries, so that the strength of the grain boundaries is improved, the possibility that cracks extend due to the through defects is reduced, and the impact toughness is improved; and addition, the impact toughness can be improved throughrefining austenite grain boundaries, and meanwhile, adding the rare-earth cerium Ce can enable the ductile-brittle transition temperature of the steel to reduce by about 10 DEG C.
Owner:BAOTOU IRON & STEEL GRP

Emulsified bitumen for vertical connected plate type unballasted track cement emulsified bitumen mortar

The invention relates to emulsified asphalt for longitudinal connecting plate type ballastless track cement emulsified asphalt mortar. The emulsified asphalt comprises the following components in percentage by weight: 60 to 65 percent of asphalt, 0.2 to 5 percent of anionic emulsifier, 0.02 to 3 percent of stabilizing agent, 0 to 4 percent of assistant, and the balance being water; and the wax content of the asphalt is less than or equal to 2.2 percent. The emulsified asphalt for the longitudinal connecting plate type ballastless track cement emulsified asphalt mortar has good emulsifying effect, is not only suitable for storage and usage under normal temperature environment, but also suitable for storage and usage under the environment of lower temperature or higher temperature, and has the advantages of good storage stability, strong temperature adaptability and the like; and the cement emulsified asphalt mortar prepared by the emulsified asphalt has the advantages of long working time, large temperature adapting range, no layering, good filling property, good physical-mechanical properties, good durability, and the like. The emulsified asphalt is applied to a plate type ballastless track, and in particular the longitudinal connecting plate type (CRTS II type) ballastless tracks of high-speed railways and passenger dedicated lines.
Owner:CHINA ACADEMY OF RAILWAY SCI CORP LTD +1

Back Contact Perovskite Solar Cell

A method is provided for forming a back contact perovskite solar cell. A substrate is coated with a positive electrode layer. The positive electrode layer is then conformally coated with a first insulator. A plurality of negative electrode segments are selectively deposited overlying the first insulator layer, and a second insulator layer is conformally deposited overlying the negative electrode segments and first insulator layer. The second insulator layer is selectively etched to expose the negative electrode segments, and an n-type semiconductor is selectively deposited overlying each exposed negative electrode segment to form n-type contacts. The first and second insulator layers are then selectively etched to expose positive electrode segments. A p-type semiconductor is selectively deposited over each exposed positive electrode segment to form p-type contacts. Finally, a hybrid organic / inorganic perovskite (e.g., CH3NH3Pbl3-XClX) layer is conformally deposited overlying the p-type and n-type contacts. A back contact solar cell is also provided.
Owner:SHARP KK

Fin type field-effect transistor forming method

A fin type field-effect transistor forming method comprises the steps of providing a semiconductor substrate and a hard mask layer covering the semiconductor substrate, wherein the hard mask layer defines the fin portion of a fin type field-effect transistor; using the hard mask layer as a mask to etch a part of the semiconductor substrate to form the fin portion; forming an isolation layer covering the fin portion, wherein the surface of the isolation layer is flush with the surface of the hard mask layer; using the hard mask layer and the isolation layer as masks and forming a well region and a punchthrough-preventing region in the semiconductor substrate, wherein the punchthrough-preventing region is located at the bottom of the fin portion; etching a part of isolation layer after the well region and the punchthrough-preventing region are formed, forming a shallow-groove isolation structure, wherein the surface of the shallow-groove isolation structure is lower than the top of the fin portion. A formed fin type field-effect transistor is better in the punchthrough-preventing effect, the fin portion is better in quality, the isolation effect of the well region is better, and the performance stability of the fin type field-effect transistor is effectively improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP
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