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Method and system for calibrating laser beam analyzer

A technology of laser beam analysis and calibration system, which is applied in the field of laser beam analyzer calibration method and system, to achieve the effect of solving the problem of traceability, easy operation and good value reproducibility

Inactive Publication Date: 2013-04-03
NAT INST OF METROLOGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a calibration method and system of a laser beam analyzer, which is used to solve the problem of traceability of the laser beam analyzer, especially the standard device of the laser beam analyzer, and ensure the accuracy and effectiveness of the beam width measured by the laser beam analyzer

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  • Method and system for calibrating laser beam analyzer

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Embodiment 1

[0033] figure 1 Shown is a schematic diagram of the composition of the laser beam profiler calibration system in the embodiment of the present invention. like figure 1 As shown, the laser beam profiler calibration system in the embodiment of the present invention includes a laser 1 , a parallel light field generating device 2 , an attenuator 3 , a diaphragm 4 with a standard aperture, and a laser beam profiler 5 to be calibrated. In order to reduce the effect of diffraction, the diaphragm 4 must be close to the sensing surface of the detector of the laser beam analyzer 5 to be calibrated; the parallel light field generating device 2 is used to shape the laser beam 10 emitted by the laser 1 into a parallel beam field 11 , to obtain a parallel beam for calibration; in order to make the power density of the incident laser not exceed the damage threshold or working range of the detector of the laser beam analyzer 5 to be calibrated, the obtained parallel beam needs to be attenuat...

Embodiment 2

[0042] On the basis of the first embodiment of the laser beam analyzer calibration system, the embodiment of the present invention also provides a laser beam analyzer calibration method, including the following steps:

[0043] S1. The laser beam emitted by the laser is shaped into a parallel beam field by a parallel light field generating device;

[0044] Specifically, turn on the laser, preheat it, and make the laser enter a stable working state. The laser beam emitted by the laser is shaped by a parallel light field generating device to construct a parallel beam field.

[0045] S2. After the parallel beam is attenuated by an attenuator, it passes through a diaphragm with a standard aperture to form a flat-top beam with a standard beam width, wherein the propagation direction of the parallel beam is parallel to the normal of the diaphragm direction, and the field radius of the parallel light beam is larger than the radius of the diaphragm;

[0046]In order to make the power...

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Abstract

The invention belongs to the technical field of calibrating of an apparatus, and discloses a method and a system for calibrating a laser beam analyzer. The structured parallel light field forms a flat top beam with a standard beam width through a diaphragm with a standard aperture; and the calibrated laser beam analyzer measures the beam width of the flat top beam, and compares the measured value with the light beam width standard value to achieve calibrating of the laser beam analyzer. The method and the system are effective and feasible, accurate and stable, and simple and convenient to operate; and the traceability issues of the measured beam width value of the laser beam analyzer are solved, and the calibrating accuracy is greatly improved.

Description

technical field [0001] The invention relates to the technical field of instrument calibration, in particular to a laser beam analyzer calibration method and system. Background technique [0002] In recent ten years of high-tech development such as laser micromachining, medical laser source diagnosis and treatment, laser radar, inertial confinement nuclear fusion, etc., more stringent requirements have been put forward for the laser beam focusing degree, beam mode and other beam quality, and at the same time The transmission characteristics of laser beams through the atmosphere or optical components need to be more accurately described and controlled. This puts forward higher requirements for the accurate and effective measurement of the laser spatial parameters used to measure the quality of the laser beam and characterize the transmission characteristics of the laser beam. Laser beam width is the most basic laser airspace parameter, and it is also a necessary measurement v...

Claims

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Application Information

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IPC IPC(8): G01B11/02
Inventor 王艳萍马冲
Owner NAT INST OF METROLOGY CHINA
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