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Self-cooled laser scanning galvanometer and method restraining temperature drift of self-cooled laser scanning galvanometer

A laser scanning galvanometer, temperature drift technology, applied in laser welding equipment, optics, optical components, etc., can solve the problems of zero point drift, easy temperature difference, low precision, etc., and achieve the effect of improving position accuracy and low price

Active Publication Date: 2015-07-22
WEIFANG LOKOMO PRECISION IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this kind of laser vibrating mirror is that it can only rely on its own mechanical structure to exchange heat with the external environment. The heat exchange status changes with the change of the ambient temperature. Low, only suitable for occasions that do not require high positional accuracy

Method used

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  • Self-cooled laser scanning galvanometer and method restraining temperature drift of self-cooled laser scanning galvanometer
  • Self-cooled laser scanning galvanometer and method restraining temperature drift of self-cooled laser scanning galvanometer
  • Self-cooled laser scanning galvanometer and method restraining temperature drift of self-cooled laser scanning galvanometer

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Experimental program
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Effect test

Embodiment 1

[0036] Such as image 3 , Figure 4 , Figure 5 , Image 6 with Figure 7Commonly shown, a self-cooling laser scanning galvanometer includes a mounting base 1, the mounting base is made of a metal or alloy material with good thermal conductivity, such as copper, aluminum or their alloy material, which can quickly conduct heat. The working parts are installed in the installation base 1, and the working parts include the X galvanometer drive plate 21, the X galvanometer 22, the Y galvanometer drive plate 31, and the Y galvanometer 32, and also include a motor for suppressing the temperature generated by the self-cooling laser scanning galvanometer. Drift suppression device, the suppression device includes: a TEC refrigeration sheet installed on the outside of the installation base 1; a temperature sensor installed on the installation base to detect the temperature of the installation base; control the TEC refrigeration sheet to work according to the temperature value detected...

Embodiment 2

[0047] Such as Figure 8 , Figure 9 with Figure 10 Commonly shown, the main difference between this embodiment and Embodiment 1 is:

[0048] The cooling working surface 411 of the TEC refrigerating sheet is attached to the surface of the installation base 1 , and the cooling working surface refrigerates the installation base 1 to achieve a constant target temperature value. The heating working surface 412 of the TEC refrigerating sheet is provided with a cooling device 6 . The cooling device 6 includes a cooling fin 61 installed on the outside of the TEC refrigeration sheet, and a cooling fan 62 is installed on the cooling fin 61 .

[0049] In this embodiment, the target temperature value of the installation base 1 is lower than the lowest temperature of the installation base 1 .

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Abstract

The invention discloses a self-cooled laser scanning galvanometer and a method restraining temperature drift of the self-cooled laser scanning galvanometer, and relates to the technical field of laser processing equipment. The self-cooled laser scanning galvanometer comprises a mounting base body which is made of materials with good thermal conductivity. A working part is arranged inside the mounting base body. The working part comprises an X galvanometer drive board, an X galvanometer, a Y galvanometer drive board and a Y galvanometer, and further comprises a restraining device which is used for restraining the fact that the self-cooled laser scanning galvanometer generates temperature drift. The restraining device comprises a thermoelectric cooler (TEC) cooling chip which is arranged on the outer side of the mounting base body, a temperature sensor which is arranged on the mounting body and used for detecting the temperature of the mounting base body and a temperature control device which controls the TEC cooling chip to work according to the temperature value detected by the temperature sensor and enables the temperature of the mounting base body to be controlled at a constant target temperature value. The self-cooled laser scanning galvanometer solves the technical problem of low precision of the position of the self-cooled laser scanning galvanometer in the prior art. The self-cooled laser scanning galvanometer has the advantages of being high in position precision, small and exquisite in size, low in cost and the like, and can be suitable for places with high requirements for position precision.

Description

Technical field [0001] The invention relates to the technical field of laser processing equipment, and in particular to a self-cooling laser scanning galvanometer and a method for suppressing its temperature drift. Background technique [0002] The laser scanning galvanometer is a high-precision, high-speed servo control system composed of a drive board and a high-speed swing motor. It is widely used in the laser industry. One of the parameter indicators of the laser scanning galvanometer is "temperature drift (unit is urad / k, k is the temperature unit Kelvin)". Temperature drift refers to changes in transistor parameters caused by changes in ambient temperature. As the temperature increases, the transistor's As the current amplification increases, the Q point (static operating point) increases; on the contrary, it decreases. This additional current is caused by temperature changes, which is understood as temperature drift, also known as "zero point drift". This phenomenon ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10B23K26/00H05K7/20
Inventor 林敬刚李婷王永峰陈海清
Owner WEIFANG LOKOMO PRECISION IND