Infinite image distance microobjective optical system

Abstract

An infinite image distance microobjective optical system belongs to the field of microobjective design. In order to overcome the defects of the optical path design of the ordinary confocal microscopy, the infinite image distance microobjective optical system comprises a diaphragm (1), a front meniscus lens (2), a first doublet (3), a second doublet (4), a rear meniscus lens (5) and a plano-convex lens (6) which are sequentially arranged along the same optical axis from a parallel light source to an object plane; the bending directions of both the front meniscus lens (2) and the rear meniscus lens (5) are back on to the diaphragm (1), the cemented surfaces of the first doublet (3) and the second doublet (4) are bent toward the diaphragm (1), and the convex of the plano-convex lens (6) is toward the diaphragm (1); the focal length of the microobjective system is set as f', the numerical aperture of the microobjective system is set as NA, the entrance pupil diameter of the microobjective system is set as D, the system magnifying power of the microobjective system is set as Beta, D is greater than or equal to 8 and less than or equal to 10, NA is greater than or equal to 0.4 and less than or equal to 0.8, and f' is greater than or equal to 6 and less than or equal to 8. The infinite image distance microobjective optical system has the advantages of flexible and simple structure, high magnifying power and good focusability.

Description

technical field [0001] The invention belongs to the field of microscopic objective lens design, and relates to an infinite-distance, monochromatic, medium-magnification microscopic objective lens system, which is applied to the field of surface shape measurement by confocal microscopy technology. Background technique [0002] In recent years, with the continuous development of science and technology and information technology, surface measurement technology is also developing in the direction of simplicity and high precision. The traditional contact method can no longer meet the application of these specific occasions, and the use of non-contact optical methods to measure the surface shape has become the focus of research. In particular, scholars at home and abroad have conducted extensive research and discussions on the measurement of surface shape by confocal microscopy. [0003] Confocal microscopy technology was first proposed by M.Minsky in 1957, and then with the effo...

AI Technical Summary

Problems solved by technology

The traditional contact method can no longer meet the application of these specific occasions, and the use of non-contact optical methods to measure the surface shape has become the focus of research.

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