Vibration-isolation platform based on height/horizontal attitude six-dimensional position detection and control
A technology of horizontal posture and vibration isolation platform, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, etc., and can solve the problems of destroying the natural frequency of the air-floating vibration isolation platform and reducing the vibration isolation performance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0016] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0017] A vibration isolation platform based on six-dimensional position detection and control of height / horizontal attitude, the vibration isolation platform body 1 of the device is supported by four vibration isolators 2 evenly distributed below, and the vibration isolators 2 include the first vibration isolation 2a, the second vibration isolator 2b, the third vibration isolator 2c and the fourth vibration isolator 2d; X-direction displacement sensor 3, Z-direction displacement sensor 4 and Y To displacement sensor 5, described X to displacement sensor 3 comprises X to first displacement sensor 3a and X to second displacement sensor 3b, described Z to displacement sensor 4 comprises Z to first displacement sensor 4a, Z to second displacement sensor The sensor 4b and the third displacement sensor 4c in the Z direction are also provided with an X-direction actuator 6, ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com