The invention discloses a
microwave differential sensor based on a substrate integrated
waveguide reentrant
resonant cavity and a microfluidic technology. The
microwave differential sensor comprises two resonant cavities and a
microfluidic chip, and each of the two cavities consists of an upper-layer cover plate and a lower-layer bottom plate which are overlapped. The middle
dielectric layers of the upper layer cover plate and the lower layer bottom plate respectively comprise a plurality of
metal through holes which are connected with the top layer
metal layer and the bottom layer
metal layer, and the bottom layer metal of the second layer plate and the top layer metal of the third layer plate are etched with feeder lines with gradually changing appearances. An annular groove is formed in each cavity, and a
capacitance column is formed in the middle of each cavity and corresponds to a
chip micro-channel. And the two cavities are respectively used as a sensing
resonant cavity and a reference
resonant cavity. According to the sensor, two reentrant resonators are ingeniously and longitudinally combined, a metal wall naturally existing between resonant cavities and a special excitation mode are utilized, and the advantages that the electric fields of the resonant cavities are highly concentrated and the micro-fluidic
chip can accurately control trace fluid are combined, the
microwave differential sensor which is compact in structure, is not interfered by factors such as temperature and
humidity, has mutually independent components, and can be used for
liquid dielectric characterization is formed.