Manufacturing process for four-degree-of-freedom piezoelectric micro-gripper

Abstract

The invention discloses a manufacturing process for a four-degree-of-freedom piezoelectric micro-gripper. The manufacturing method has the advantages that piezoelectric wafers and electrodes on the surfaces of the piezoelectric wafers of the four-degree-of-freedom piezoelectric micro-gripper manufactured through the method have high shape and dimensional accuracy, high relative position accuracy is achieved between the upper wafer and the lower wafer and the electrodes of the upper wafer and the lower wafer, and therefore the four-degree-of-freedom piezoelectric micro-gripper has the good output characteristics such as good output displacement and output force repeatability, high response speed and high inherent frequency; due to the fact that each gripper finger of the manufactured four-degree-of-freedom piezoelectric micro-gripper can move in the clamping direction and the direction perpendicular to the clamping direction, in other words, each gripper finger has degrees of freedom in two directions, and the whole piezoelectric micro-gripper has four degrees of freedom; thus, part of front-end executing mechanisms of a micro-assembly and micro-operation system can be omitted, the design difficulty and complexity of the system are lowered, the mass and size of the system are reduced, and the cost of the system is also reduced.

Description

Technical field [0001] The invention relates to the technical field of micro / nano positioning, and belongs to an end effector in a micro / nano positioning system such as micro-parts assembly and cell micro-manipulation, and in particular to a manufacturing process of a four-degree-of-freedom piezoelectric micro clamp. Background technique [0002] Micro clamps are end effectors that can produce micron or nanometer-level motion accuracy and motion resolution. It can be used in cutting-edge technology fields such as MEMS and bioengineering. In MEMS, micro-grippers can pick up and transport micro-components such as micro-shafts and micro-gears, as well as micro-components such as micro-motors and micro-pumps. In bioengineering, micro-grippers are used to capture and release cells. Combined with the micro-impact probe, it can inject or extract a component from the cell. [0003] Each finger of the current micro-gripper has only one degree of freedom in the clamping direction, and the e...

AI Technical Summary

Problems solved by technology

[0003] Each finger of the current micro gripper has only one degree of freedom in the clamping direction, and the whole micro gripper has only two degrees of freedom, which can only realize the movement in the gripping direction, and the movement in other directions must pass through the actuator at the front end This increases the complexity and design difficulty of the entire micro-assembly and micro-operating system, and increases the cost

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