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Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus

A technology for scanning probes and auxiliary magnetic heads, applied in scanning probe microscopy, scanning probe technology, magnetic heads using thin films, etc., can solve problems such as inspection without considering surface shape

Inactive Publication Date: 2013-04-17
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the inspection of the surface shape of the near-field light or the near-field light emitting part generated by the magnetic head element for the next-generation hard disk, that is, the thermally assisted magnetic head element, and the inspection of the positions of the near-field light emitting part and the writing magnetic field generating part are not considered. relationship, etc.

Method used

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  • Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus
  • Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus
  • Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] use Figure 1A and Figure 1B A schematic configuration of the cantilever 10 capable of measuring both near-field light and magnetic field in Example 1 of the present invention will be described. Figure 1A It is a plan view showing a schematic structure of a cantilever 10 capable of measuring both near-field light and a magnetic field in this embodiment, Figure 1B is its side view.

[0044] exist Figure 1A and Figure 1B In the cantilever 10 capable of measuring both near-field light and magnetic field, a probe 4 having a tetrahedral structure is formed at the tip of a plate-shaped rod 1 . The rod 1 and the probe 4 are formed of silicon (Si). A thin magnetic film 2 (such as Co, Ni, Fe, NiFe, CoFe, NiCo, etc.) is formed on the front side of the rod 1 and the probe 4, and a noble metal (such as gold, silver, platinum, etc.) or Fine particles or thin films 3 of alloys containing noble metals. The cantilever 10 is provided with a rod 1, a probe 4, a thin magnetic fil...

Embodiment 2

[0086] Image 6 It is a block diagram showing the overall structure of the heat-assisted magnetic head element inspection apparatus 600 in the second embodiment of the present invention. Image 6 The heat-assisted magnetic head element inspection apparatus 600 shown has basically the same structure as the heat-assisted magnetic head element inspection apparatus 100 described in the first embodiment. exist Image 6 In the structure of the thermally assisted magnetic head component inspection device 600 shown, for the Figure 3A Components common to the configuration of the thermally assisted magnetic head element inspection apparatus 100 described in , are given the same reference numerals.

[0087] In Embodiment 2, the difference from Embodiment 1 is that a laser light source 501 is provided directly above the cantilever 10, and laser light is irradiated from above the cantilever 10 through the laser light source 501, so that the noble metal formed on the surface of the prob...

Embodiment 3

[0105] according to Figure 8A as well as Figure 8B , the schematic configuration of the cantilever 10 capable of measuring both near-field light and magnetic field in Example 3 of the present invention will be described. Figure 8A It is a side view showing the schematic structure of the cantilever 210 capable of measuring both near-field light and magnetic field in this embodiment, Figure 8B It is a side view showing a schematic structure of the cantilever 310 .

[0106] exist Figure 8A In the cantilever 210 and the cantilever 310 capable of measuring both near-field light and magnetic field, a probe 4 having a tetrahedral structure is formed at the tip of a plate-shaped rod 1 . The rod 1 and the probe 4 are formed of silicon (Si). A thin magnetic film 2 (such as Co, Ni, Fe, NiFe, CoFe, NiCo, etc.) is formed on the front side of the rod 1 and the probe 4, and a material capable of converting the wavelength of light (fluorescent light) is formed on the surface of the m...

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Abstract

To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.

Description

technical field [0001] The present invention relates to a cantilever of a scanning probe microscope capable of measuring both near-field light and a magnetic field, and a manufacturing method thereof, as well as a scanning probe microscope for performing near-field light measurement and microscale magnetic field measurement for inspecting the heat of a thin-film thermally assisted magnetic head element. An inspection method and device for an auxiliary magnetic head element. Background technique [0002] As magnetic heads for next-generation hard disks, studies have begun on Japanese Patent Laid-Open No. 2010-182394 (Patent Document 1), Japanese Patent Laid-Open No. 2011-86362 (Patent Document 2), Japanese Patent Laid-Open No. 2011-113595 Publication No. (Patent Document 3) and the like are thermally assisted magnetic head elements. The near-field light generated from the heat-assisted magnetic head element has a width of 20 nm or less from the head element, and this width d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/31G11B5/455G11B5/48
CPCG01Q60/06G01Q60/22G01Q60/56G11B5/314G11B5/3166G11B5/3173G11B5/3196G11B2005/0021B82Y20/00B82Y35/00G01Q60/50
Inventor 张开锋广濑丈师渡边正浩中込恒夫本间真司徳富照明中田俊彦立崎武弘
Owner HITACHI HIGH-TECH CORP
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