Adjustment method of holographic variable spacing grating exposure light path

Abstract

The invention discloses an adjustment method of holographic variable spacing grating exposure light path, belongs to the technical field of spectrums, and aims to solve the problems that measurement difficulty is high and precision is low in the prior art. The adjustment method includes that step one, an exposure light path of a holographic variable spacing grating is initially established; step two, an exposure light path adjustment device of the holographic variable spacing grating is established; step three, interference fringes are processed by a computer, a function of spacing and curvature of the fringes in an interference pattern is fit, misalignment rate of light path parameters are calculated, and the light path is adjusted according to the misalignment rate; step four, the step two and the step three are repeated until the misalignment rate meets the requirement of a tolerance; step five, another light path is adjusted according to the step two, the step three and the step four; and step six, a basement of the grating is fixed at an object plane position of a charge coupled device (CCD) camera, the adjustment is accomplished, in the making process of the holographic variable spacing grating, the exposure light path parameters are learned through the processing and calculation to the exposure light path and the interference fringes of a reference light path, data can be obtained in real time and accurately, and the making efficiency and precision of the holographic variable spacing grating is improved.

Description

technical field [0001] The invention belongs to the field of spectrum technology, and in particular relates to a method for installing and adjusting an exposure light path of a holographic variable-pitch grating. Background technique [0002] The holographic variable pitch grating has curved lines with unequal spacing. By optimizing the groove function of the reticle, certain aberrations can be eliminated, thereby improving the imaging quality of the optical system. The application of holographic variable pitch grating can greatly improve the performance of spectroscopic instruments. [0003] The production principle of the holographic variable pitch grating is to use photoresist to record the interference fringes of two beams of coherent spherical waves or aspheric waves, and then convert them into relief contours after development. In the manufacturing process of the holographic variable-pitch grating, the parameters of the exposure light path determine the groove functi...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem of difficult measurement and low precision in the installation and adjustment of the holographic variable pitch grating exposure light path, the present invention introduces the idea of ​​computer-aided adjustment into the process of holographic variable pitch grating exposure system installation and adjustment, and proposes a holographic variable pitch grating. A method capable of measuring exposure light path parameters in real time during grating fabrication

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