Test method and test system for integrated sensor

A technology of integrated sensors and testing methods, applied in the direction of instruments, etc., can solve the problems of high cost and low efficiency of integrated sensors, and achieve the effects of avoiding misoperation, reducing production costs, and improving testing efficiency

Active Publication Date: 2015-07-01
MEMSIC SEMICON WUXI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is that the existing integrated sensor testing method has high cost and low efficiency

Method used

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  • Test method and test system for integrated sensor

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Embodiment Construction

[0046] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0047] In an embodiment of the testing method of the integrated sensor involved in the present invention, wherein the integrated sensor to be tested includes a triaxial magnetic sensor and a triaxial acceleration sensor, it comprises the following steps:

[0048] Use the standard circuit to calibrate the test parameters of the X, Y, and Z axes of the device test board (DUT board, Device Under Test board) interface, including geomagnetic field parameters and gravity field parameters;

[0049] Use an automatic pick and place handler to load the integrated sensor to be tested into the interface provided on the device test board;

[0050] Use an automatic pick-and-place device to place the device test board on the test platform of the test device;

[0051] Adjust the position of the device test board so that the X-axis of the magnetic sensor is p...

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Abstract

The invention relates to a test method and a test system for an integrated sensor. The test method comprises the steps of sequentially enabling a magnetic sensor of the to-be-tested integrated sensor and an X-axis of an acceleration sensor to be parallel to the direction of a geomagnetic field and the direction of a gravitational field, utilizing a corrected integrated sensor testing device to sequentially read-out output of the magnetic field and the gravitational field of the X-axis of the to-be-tested integrated senor by tests, and then calculating bias output and sensitivity of the X-axis of the to-be-tested integrated sensor according to the output data obtained by the tests. According to the test method and the test system for the integrated sensor, the tests for the magnetic sensor and the acceleration sensor of the integrated sensor are achieved for once, test efficiency is greatly improved, production cost of the integrated sensor is reduced to a certain degree, and mass production and popularization of the integrated sensor are benefited.

Description

technical field [0001] The invention relates to a testing method of an integrated sensor and a testing system thereof, in particular, a testing method of an integrated sensor integrating a magnetic sensor and an acceleration sensor and a testing system thereof. Background technique [0002] With the increasing function of consumer electronics, the application of sensors is gradually becoming popular, and the magnetic sensor and acceleration sensor in the sensor have gradually become the standard configuration of some handheld electronic products. With the continuous development of sensor applications and the requirements of integration, new sensors integrating acceleration sensors and magnetic sensors have also come out. Among them, the integrated sensor with the highest integration technology is an integrated sensor integrating a three-axis magnetic sensor and an acceleration sensor, which has been applied to actual needs. [0003] This new type of integrated sensor, becau...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D18/00
Inventor 刘海东顾浩琦丁雪龙
Owner MEMSIC SEMICON WUXI
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