Method for determining and/or monitoring at least one process variable of a medium, a corresponding electrochemical sensor and a corresponding system
A process variable and sensor technology, applied in the direction of material electrochemical variables, test water, material inspection products, etc., can solve the problem of inaccurate measurement
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[0050] figure 1 The structure of the electrochemical sensor 1 realized according to the present invention is schematically shown. Reference number 1 refers to all sensors. Sensor 1 is produced using thick film technology. However, thin film technology is also a manufacturing option.
[0051] In the case of thick film technology, the (functional) layer is most often applied to the support using screen printing followed by firing. Often during this process additional, non-printable components are applied to the carrier, for which purpose thick-film hybrid techniques are also mentioned.
[0052] In the case of thin-film technology, methods using physical (e.g. evaporation, sputtering, ion plating or ICB (ionized particle beam) techniques) and chemical vapor deposition (in particular also plasma-supported methods) are most often The deposition of the layer takes place on the entire surface of the carrier, which is a substrate made of silicon or ceramic.
[0053] The sensor 1 ...
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