Temperature stabilizing and controlling system of laser

Abstract

The invention discloses a temperature stabilizing and controlling system of a laser. The temperature stabilizing and controlling system of the laser comprises a first temperature sensor, a second temperature sensor, a third temperature sensor, a fourth temperature sensor and a fifth temperature sensor, wherein the first temperature sensor is located at the position of an air outlet in a discharge area inside a cavity body of a discharge cavity of the laser, the second temperature sensor is located at the position of an air inlet in the discharge area inside the cavity body of the discharge cavity, the third temperature sensor is located on the inner wall of the cavity body, the fourth temperature sensor is located in a water outlet pipeline of a heat exchange system, and the fifth temperature sensor is located in a water outlet pipeline of a cooling system of the cavity body. The first temperature sensor, the second temperature sensor, the third temperature sensor, the fourth temperature sensor and the fifth temperature sensor are respectively used for detecting temperature of the air outlet in the discharge area, the air inlet in the discharge area in the discharge cavity, the cavity body of the discharge cavity and cooling water in the water outlet pipelines, and are connected with an automatic digital recording and control (ADRC) through lines so that temperature signals detected by the temperature sensors are sent to the ADRC. The ADRC is used for controlling flow regulating valves on water inlet pipelines of the heat exchange system and the cooling system of the cavity body according to the temperature signals, and for controlling an electric heater, so that controlling on the laser is achieved. According to the temperature stabilizing and controlling system of the laser, temperature stability of an excimer gas laser system is improved.

Description

technical field [0001] The invention relates to the technical field of gas lasers, in particular to a temperature stabilization control system for lasers, in particular to a temperature stabilization control system for excimer gas lasers. Background technique [0002] Excimer gas lasers are pulsed gas lasers that work in the ultraviolet band. At present, the laser lithography technology used for large-scale integrated circuits breaks through 45nm resolution and is the mainstream choice of current lithography light sources. [0003] The discharge cavity is the core component of the excimer gas laser, mainly including the discharge electrode, gas circulation system and heat dissipation system. Its comprehensive operation performance determines the high-voltage discharge capability, laser output quality and overall operation efficiency of the laser. [0004] The performance of the laser depends to some extent on the operating temperature of the discharge cavity. The working ga...

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Problems solved by technology

[0012] The technical problem to be solved by the present invention is that the temperature control ability of the c...

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