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Single-mode photonic crystal vertical cavity surface emitting laser and preparation method thereof

A technology of vertical cavity surface emission and photonic crystals, which is applied in the direction of semiconductor lasers, lasers, phonon exciters, etc., can solve the problems of affecting the injection current distribution, uneven current expansion, and single-mode output power of only 3.1mW. Solve the problem of current injection, increase the output power, and improve the effect of single-mode output power

Inactive Publication Date: 2013-05-15
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

But so far the single-mode output power of photonic crystal VCSEL is only 3.1mW
In addition, the photonic crystal VCSEL is etched with periodically distributed air holes with defects on the upper DBR. Although it can improve the single-mode power performance, the introduction of the photonic crystal structure will affect the distribution of the injected current, resulting in Inhomogeneous current spread affects carrier distribution and mode changes in the active region, etc.

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  • Single-mode photonic crystal vertical cavity surface emitting laser and preparation method thereof
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  • Single-mode photonic crystal vertical cavity surface emitting laser and preparation method thereof

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[0021] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0022] It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. Implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints. In addition, the directional terms mentioned in the following embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only re...

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Abstract

The invention provides a single-mode photonic crystal vertical cavity surface emitting laser and a preparation method of the single-mode photonic crystal vertical cavity surface emitting laser. According to the single-mode photonic crystal vertical cavity surface emitting laser, light permeability and electric conduction characteristics of a transparent conductive layer are utilized, current is enabled to be evenly injected into an active region, and therefore the current injection problem is solved, and the single mode output power is improved.

Description

technical field [0001] The invention relates to the field of semiconductor lasers, in particular to a single-mode photonic crystal vertical cavity surface emitting laser and a preparation method thereof. Background technique [0002] Vertical cavity surface emitting laser (VCSEL) is a laser that emits light from a vertical surface. Compared with traditional edge emitting semiconductor lasers, it has the following advantages: 1) The beam quality is good, and it is easy to couple with fibers; 2) The cavity length is very short and the longitudinal mode spacing is large. , to achieve single longitudinal mode operation in a wide temperature range; 3) Ultra-narrow line width and high modulation rate; 4) The light output direction is vertical to the substrate, easy to two-dimensional high-density integration; 5) High luminous efficiency and extremely low power consumption; 6) On-chip testing, low production cost, etc. At present, VCSEL has been widely used in optical fiber commun...

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Application Information

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IPC IPC(8): H01S5/183
Inventor 渠红伟张冶金张建心刘磊齐爱谊王海玲马绍栋石岩郑婉华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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