A flexible electronic device, method for manufacturing same, and a flexible substrate
A flexible electronic device and flexible substrate technology, which is applied in semiconductor/solid-state device manufacturing, electric solid-state device, printed circuit manufacturing, etc., can solve the problems of economical reduction, surface roughness reduction, high-temperature processing, etc., and achieve saving Processing time and cost, effect of low cost
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Embodiment 2
[0082] Such as figure 2 As shown in a, different from Embodiment 1, in Embodiment 2, the flexible substrate 200 is manufactured by forming a release layer 500 between the motherboard 100 and the flexible substrate 200 . When the peeling layer 500 is formed, the separation form of the flexible substrate 200 can be as follows: it can be separated from the interface of the flexible substrate 200 ( figure 2 b), or separated from the interface between the motherboard 100 and the release layer 500 ( figure 2 c), or separated from the inner surface of the release layer 500 ( figure 2 d). at this time, figure 2 The case of b does not require subsequent processing, but figure 2 c and figure 2 The case of d may also include removing the peeling layer 500 .
[0083] In Example 2 of the present invention, an ITO layer as a peeling layer is formed on a glass substrate with a thickness of 120 nm, and a Ti / Au / Cu flexible substrate is formed by forming a 50 nm layer for forming a...
Embodiment 3
[0085] image 3 A method of manufacturing a flexible electronic device according to a third embodiment of the present invention is schematically shown. Such as image 3 As shown, in the method for manufacturing a flexible electronic device according to the third embodiment of the present invention, a flexible substrate 200 is formed on a motherboard 100, wherein a release layer 500 is placed between the motherboard 100 and the flexible substrate 200 ( image 3 a), bonding the temporary substrate 600 on the flexible substrate 200, wherein the adhesive layer 700 is placed between the flexible substrate 200 and the temporary substrate 600 ( image 3 c). After that, the motherboard 100 formed on the flexible substrate 200 is separated by the peeling layer 500 ( image 3 d), forming an electronic device 300 and an encapsulation layer 400 on the separated surface of the flexible substrate 200 to manufacture a flexible electronic device ( image 3 e).
[0086] That is, the metho...
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