Grinding amount on-line monitoring device at ring-polishing stage and grinding amount on-line monitoring method

Abstract

The invention discloses a grinding amount on-line monitoring device at a ring-polishing stage and an on-line monitoring method. The on-line monitoring device comprises a white light source (1), a collimating mirror (2), a polarizer (3), a common beam splitter (4), a wide-spectrum polarized beam splitter prism (5), a dispersion compensating mirror (6), a reference reflecting mirror (7), an analyzer (8), a CCD (charge coupled device) (9) and a display screen (10); the method comprises the following steps: a, calibrating the grinding amount on-line monitoring device: changing the white light source in the grinding amount on-line monitoring device with a homogeneous light LED (lighting emitting diode) with known wave length, determining a proportionality coefficient C between fringe offset amount and light path variable quantity according to fringe spacing and a reading number on a graduated scale labeled on the display screen (10), and fixing the relation between white light fringe offset amount read on the graduated scale and practical grinding amount according to the proportionality coefficient, and b, actual measurement of grinding amount: changing the homogeneous light LED in the grinding amount on-line monitoring device with the white light source, rotating the polarizer (3) to adjust the relative light intensity between tested light and reference light, and monitoring white light center fringe offset amount during the ring-polishing process till the grinding amount meets the requirements. Grinding amount on-line monitoring can be realized according to the device and the method.

Description

Technical field: [0001] The invention belongs to the field of optical interferometry, in particular to a device for realizing on-line monitoring of grinding amount on a ring polishing machine and a method for real-time monitoring of grinding amount based on the device. Background technique [0002] High-precision optical components, especially large-diameter and high-precision optical components, generally use circular polishing (ring polishing) or a combination of ring polishing and numerical control to complete the final precision polishing after forming, fine grinding and initial polishing. In the processing of optical components, ring polishing is a key step in the surface of optical components from precision to ultra-precision. [0003] At present, the detection of the amount of grinding in the domestic ring polishing stage all adopts an offline method, and the ring polishing process of the workpiece is separated from the surface shape inspection process. The skilled w...

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Problems solved by technology

[0007] 3. This detection method reduces the production efficiency of workpiece processing

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