Equal altitude test apparatus of air floatation blocks

A testing device and air-floating block technology, which are applied to measuring devices, mechanical measuring devices, and mechanical devices, etc., can solve the problems that affect the rigidity of the I-shaped motion module, the uneven thickness of the air film, and affect the motion performance of the workpiece table.

Active Publication Date: 2013-07-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Application Information

AI Technical Summary

Problems solved by technology

In the H-type large-stroke high-precision workpiece table, the two ends of the I-shaped motion module 2' are closely attached to the long-stroke precision guide rail 1' through multiple pieces and sets of ball joint air bearing blocks a. During operation, the motion modules are relatively The frictional resistance on the surface of the precisi

Method used

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  • Equal altitude test apparatus of air floatation blocks
  • Equal altitude test apparatus of air floatation blocks
  • Equal altitude test apparatus of air floatation blocks

Examples

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Embodiment Construction

[0040] like figure 2 , image 3 and Figure 4 As shown, the air-floating block contour test device of this embodiment includes a horizontally arranged platform 4, and four feet 2 with adjustable height are installed under the platform 4, so the platform can be adjusted by changing the height of the feet 2 4 level.

[0041] A longitudinally arranged parallel gauge 1 is installed on the platform 4 through hexagon socket screws, and a high-precision measurement reference block 9 mounted on the platform 4 is also arranged on the side of the parallel gauge 1 .

[0042] The platform 4 is also equipped with a horizontally arranged square 3, and the square 3 is located on the right side of the parallel gauge 1 (the so-called "front, rear, left, right" in this example, so figure 2 For reference, the lower part of the paper is "front", and the upper part of the paper is "rear") and is closely attached to the parallel ruler 1, and the square ruler 3 and the parallel ruler 1 are perp...

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Abstract

The invention discloses an equal altitude test apparatus of air floatation blocks. The apparatus is used for the equal altitude test before installing air floatation blocks required by the motion of an H-shaped large-stroke high-precision stage in a lithography machine. The equal altitude test apparatus of air floatation blocks comprises a horizontally arranged platform and foundations having adjustable heights and arranged under the platform, and a parallel gauge, a square foot, anti-thrust mechanisms, a standard thrust column, a crimping mechanism and a thrust mechanism are arranged on the platform. The relative altitude values of all the ball-joint air floatation blocks can be measured through the apparatus, so the air floatation surface of a plurality of groups of ball-joint air floatation blocks at two ends of a motion module reaches a 0.004mm co-planarity degree requirement.

Description

technical field [0001] The invention relates to an air-floating block contour testing device, which is used for the contour testing of the air-floating block before installation required for the movement of an H-shaped large-stroke high-precision workpiece stage in a lithography machine. Background technique [0002] The lithography machine is a key equipment in the field of micro-fabrication IC, and the motion performance of the workpiece table is directly related to the lithography quality of the chip. [0003] like figure 1 As shown, the H-type large-stroke high-precision workpiece table mainly includes: long-stroke precision guide rail 1', I-shaped motion module 2', and ball joint air blocks a at both ends of the I-shaped motion module. In the H-type large-stroke high-precision workpiece table, the two ends of the I-shaped motion module 2' are closely attached to the long-stroke precision guide rail 1' through multiple blocks and groups of ball joint air-buoy blocks a. ...

Claims

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Application Information

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IPC IPC(8): G03F7/20G01B5/02
Inventor 李莉赵正龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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