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Equal altitude test apparatus of air floatation blocks

A technology of testing device and air floating block, which is applied in the direction of measuring device, mechanical measuring device, and mechanical device, etc. It can solve the problems of uneven thickness of air film, affecting the rigidity of I-shaped motion module, and affecting the motion performance of workpiece table, etc.

Active Publication Date: 2015-06-17
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the H-type large-stroke high-precision workpiece table, the two ends of the I-shaped motion module 2' are closely attached to the long-stroke precision guide rail 1' through multiple pieces and sets of ball joint air bearing blocks a. During operation, the motion modules are relatively The frictional resistance on the surface of the precision guide rail is minimized, and during the movement, the thickness of the air film is only 0.008mm. If there are multiple ball joint air bearing blocks with different heights, this will lead to uneven thickness of the air film. Thus directly affecting the stiffness of the I-shaped motion module and the motion performance of the workpiece table

Method used

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  • Equal altitude test apparatus of air floatation blocks
  • Equal altitude test apparatus of air floatation blocks
  • Equal altitude test apparatus of air floatation blocks

Examples

Experimental program
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Embodiment Construction

[0040] Such as figure 2 , image 3 and Figure 4 As shown, the air floating block contour test device of this embodiment includes a platform 4 arranged horizontally, and four height-adjustable feet 2 are installed below the platform 4, so the platform can be adjusted by changing the height of the feet 2 4 levels.

[0041] A longitudinally arranged parallel gauge 1 is installed on the platform 4 through a hexagon socket head cap screw, and a high-precision measurement reference block 9 mounted on the platform 4 is also arranged on the side of the parallel gauge 1 .

[0042] Described platform 4 also is equipped with the square ruler 3 of horizontal arrangement, and this square ruler 3 is positioned at the right side of parallel gauge 1 (the said " front, rear, left, right " of this example, is based on figure 2 For reference, it is "front" by the bottom of the paper, and "rear" by the top of the paper) and is closely attached to the parallel gauge 1, and the square ruler 3...

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Abstract

The invention discloses an equal altitude test apparatus of air floatation blocks. The apparatus is used for the equal altitude test before installing air floatation blocks required by the motion of an H-shaped large-stroke high-precision stage in a lithography machine. The equal altitude test apparatus of air floatation blocks comprises a horizontally arranged platform and foundations having adjustable heights and arranged under the platform, and a parallel gauge, a square foot, anti-thrust mechanisms, a standard thrust column, a crimping mechanism and a thrust mechanism are arranged on the platform. The relative altitude values of all the ball-joint air floatation blocks can be measured through the apparatus, so the air floatation surface of a plurality of groups of ball-joint air floatation blocks at two ends of a motion module reaches a 0.004mm co-planarity degree requirement.

Description

technical field [0001] The invention relates to a contour testing device for an air floating block, which is used for contour testing before installation of an air floating block required for the movement of an H-shaped large-stroke high-precision workpiece table in a photolithography machine. Background technique [0002] The lithography machine is a key equipment in the field of micro-manufacturing IC, and the motion performance of the workpiece table is directly related to the lithography quality of the chip. [0003] Such as figure 1 As shown, the H-type large-stroke and high-precision workpiece table mainly includes: long-stroke precision guide rail 1', I-shaped motion module 2', and ball joint air bearing blocks a at both ends of the I-shaped motion module. In the H-type large-stroke high-precision workpiece table, the two ends of the I-shaped motion module 2' are closely attached to the long-stroke precision guide rail 1' through multiple pieces and sets of ball join...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G01B5/02
Inventor 李莉赵正龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD