Large-size high-speed micropore drilling system

A large-format, micro-hole technology, used in welding equipment, laser welding equipment, metal processing equipment, etc., can solve the problems of poor control of fine processing and poor control of laser beam modulation trajectory, and achieve rich spatial trajectory modulation motion, Improve efficiency and drilling quality, improve the effect of scanning processing format
CN103203552AActive Publication Date: 2013-07-17张立国
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
张立国
Publication Date
2013-07-17

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Abstract

The invention relates to a large-size high-speed micropore drilling system which comprises a light beam space modulation module and a galvanometer scanning flat field focusing module. Particularly, the light beam space modulation module, particularly a plurality of transparent flat optical elements are combined with the galvanometer scanning flat field focusing module, the light beam space modulation module is used for modulating the space trace of a laser light beam, the galvanometer scanning flat field focusing module is used for focusing laser and rapidly switching laser spots at different machining positions, and the two modules are in division and cooperation. By the aid of the scheme, large-size micropore drilling can be realized, laser drilling efficiency and drilling quality are greatly improved, the large-size high-speed micropore drilling system is quite suitable for drilling straight holes, laser light beam filling and scanning shapes and sizes can be dynamically controlled, micropore drilling pore diameters can be dynamically changed, and fine structures can be flexibly machined.
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Description

technical field

[0001] The invention relates to the field of laser processing, in particular to a large-format micro-hole high-speed drilling system device. Background technique

[0002] In the field of laser drilling, the laser focus is switched between holes, and galvanometer scanning is undoubtedly the fastest switching method, which is manifested in high acceleration and deceleration and displacement linear speed, as well as positioning speed. The two-dimensional displacement platform is undoubtedly a very slow method, and it is rarely used in general.

[0003] The patent application number is 201010183539.7. The beam rotation module used cannot dynamically change the beam rotation diameter during processing, and is only suitable for the situation where the diameter of the drilling hole on the same workpiece surface changes little. So there are certain limitations.

[0004] The application number is 200380110303.9. There is no problem with the galvanometer used to swit...

Claims

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