Separating and purifying system for sulfur hexafluoride and carbon tetrafluoride
A technology of sulfur hexafluoride and carbon tetrafluoride, which is applied in the field of separation and purification, and gas recovery, can solve the problems that do not involve CF4 separation and purification, and achieve the effect of complete functions and simple operation
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[0020] like figure 1 As shown, the separation and purification system of sulfur hexafluoride and carbon tetrafluoride of the present invention includes a mixed gas recovery pipeline, and the mixed gas recovery pipeline is respectively connected with a circulation purification pipeline, a sulfur hexafluoride purification pipeline and tetrafluoride Carbon purification lines.
[0021] The mixed gas recovery pipeline includes a recovery port self-sealing joint 2, a first solenoid valve V2, an air cooler 3, a molecular sieve 4, a first manual normally open valve C1, and a first compressor 5, which are connected in sequence through the first high-pressure pipe 1 , air cooler 3 bypass, first one-way valve 6, first cold heat exchanger 7, second solenoid valve V9, third solenoid valve V8, second manual normally open valve C2 and sulfur hexafluoride purification tank 8. The first cold and heat exchanger 7 is connected to the first refrigerator 9 through the fourth solenoid valve D1; th...
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