Double-auto-collimation optical system checking and regulating tube
An optical system and self-collimation technology, applied in the direction of optics, optical components, instruments, etc., can solve the problems of coverage pitch deviation, high cost, very strict environmental requirements, etc., to ensure stability and reliability, and eliminate external structural deformation , high stability and high precision
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[0016] Such as figure 1 As shown, a double self-collimating optical system inspection tube includes a casing, and two self-collimating optical systems are arranged in the casing. The first self-collimation optical system and the second self-collimation optical system irradiate the light emitted by the light source onto the measured mirror 10 through the optical device respectively, and the first self-collimation optical system and the second self-collimation optical system The included angle formed by the two light rays emitted by the optical system is an acute angle, and the measured reflector 10 is located at the intersection of the two rays. If the reflective surface of the measured reflector is perpendicular to the incident light of the optical system, the light is still Backtrack.
[0017] Each self-collimating optical system includes a light source 1, a cross reticle 2, a first dichroic prism 4, a first mirror 6, a second mirror 7, a first objective lens 8, a second obj...
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