Device for testing nano scratch and friction stick-slip properties of film surfaces
A characteristic testing and nanotechnology, which is applied in the field of nano-scribing and friction stick-slip test device on the film surface, can solve the problem of inability to reflect the stick-slip behavior, and achieve the effect of realizing the test function of friction and stick-slip characteristics.
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[0028] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0029] see figure 1 , 2 As shown, the present invention provides a kind of thin film surface nanometer scribing and friction stick-slip characteristic testing device, comprises base 1, is installed on the base 1 and is used for placing the piezoelectric motion platform 2 of detection sample, and can vertically and horizontally A moving stage 3, the piezoelectric motion platform 2 adopts an xy-direction piezoelectric precision motion platform driven by a piezoelectric ceramic scanner for an atomic force microscope (AFM); the piezoelectric ceramic scanner is connected to a control cabinet , can realize movement in the x and y directions; the translation stage 3 can carry out automatic movement in the z direction, and manual movement in the x and y directions. The sensor holder 4 is installed on the translation table 3, and the front end of the sensor holder 4 is fixed...
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