Device for testing nano scratch and friction stick-slip properties of film surfaces

A characteristic testing and nanotechnology, which is applied in the field of nano-scribing and friction stick-slip test device on the film surface, can solve the problem of inability to reflect the stick-slip behavior, and achieve the effect of realizing the test function of friction and stick-slip characteristics.

Inactive Publication Date: 2013-08-07
XI AN JIAOTONG UNIV
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Problems solved by technology

If a high tangential stiffness friction test device is used, the friction coefficient in th

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  • Device for testing nano scratch and friction stick-slip properties of film surfaces
  • Device for testing nano scratch and friction stick-slip properties of film surfaces
  • Device for testing nano scratch and friction stick-slip properties of film surfaces

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Embodiment Construction

[0028] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] see figure 1 , 2 As shown, the present invention provides a kind of thin film surface nanometer scribing and friction stick-slip characteristic testing device, comprises base 1, is installed on the base 1 and is used for placing the piezoelectric motion platform 2 of detection sample, and can vertically and horizontally A moving stage 3, the piezoelectric motion platform 2 adopts an xy-direction piezoelectric precision motion platform driven by a piezoelectric ceramic scanner for an atomic force microscope (AFM); the piezoelectric ceramic scanner is connected to a control cabinet , can realize movement in the x and y directions; the translation stage 3 can carry out automatic movement in the z direction, and manual movement in the x and y directions. The sensor holder 4 is installed on the translation table 3, and the front end of the sensor holder 4 is fixed...

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Abstract

The invention discloses a device for testing the nano scratch and friction stick-slip properties of film surfaces. The device comprises a base, wherein the base is provided with a piezoelectric motion platform for holding test samples and a displacement platform capable of moving vertically and horizontally, the displacement platform is provided with a sensor holder, the front end of the sensor holder is fixedly provided with a nano scratch and stick-slip testing sensor, the scratching head of the nano scratch and stick-slip testing sensor is located right above the piezoelectric motion platform, and the base is also provided with an optical imaging system. According to the device disclosed by the invention, the motion platform and the sensor are organically combined, through different motion control modes, on the one hand, a nano scratch test on films can be completed, and therefore the defects that an AFM (Atomic Force Microscope) nano scratch device is limited in a loading range and difficult to control, and has high requirements on the surface roughness of samples are overcome; and on the other hand, the online test on the friction stick-slip properties of film surfaces can also be completed, therefore, the defect that a high-stiffness friction tester can not reflect the friction stick-slip properties of surfaces is overcome.

Description

technical field [0001] The invention relates to the field of nanometer surface testing, in particular to a device for testing film surface nanometer scribing and friction stick-slip characteristics. Background technique [0002] In recent years, nano-films represented by carbon-based films have been used as ideal wear-resistant protective coatings and solid lubricants because of their excellent mechanical properties such as high hardness, low friction coefficient, and high wear resistance. It has been widely used in media protection and medical fields, which has attracted the attention of researchers. [0003] At present, the nano-mechanical performance evaluation methods of carbon-based films mainly include nano-indentation and scratch testing. Since Stillwon and Tabor proposed the method of measuring the mechanical properties of materials using the elastic recovery process of indentation in 1961, nanoindentation has become a reliable test method for obtaining the hardness...

Claims

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Application Information

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IPC IPC(8): G01N3/40G01N19/02G01N3/46
Inventor 刁东风于力伟范雪
Owner XI AN JIAOTONG UNIV
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