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Device and method for producing solar cells

A technology for solar cells and substrates, which can be used in circuits, photovoltaic power generation, electrical components, etc., and can solve the problems of weak film adhesion and difficult formation of stoichiometric compounds.

Active Publication Date: 2016-02-10
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The different melting points of these four elements make it very difficult to control the formation of stoichiometric compounds on large substrates
Also, when co-evaporation is used, film adhesion is very weak

Method used

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  • Device and method for producing solar cells
  • Device and method for producing solar cells
  • Device and method for producing solar cells

Examples

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Embodiment Construction

[0038] Referring to the drawings, wherein like elements are designated with like numerals to facilitate understanding of the drawings. Various embodiments of multi-gate semiconductor devices and methods of forming the same are described. The figures are not drawn to scale.

[0039]The following description is an operational teaching of a representative set of examples. Many changes may be made to the embodiments described herein while still obtaining favorable results. Some of the desired effects discussed below can be obtained by selecting some components or steps discussed herein without using others. Thus, many modifications and adaptations, and subsets of the components and steps described herein are possible and in some cases even suitable. Accordingly, the following description is exemplary and not limiting.

[0040] The description of the exemplary embodiments is intended to be read in conjunction with the accompanying drawings, which are a part of this entire speci...

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PUM

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Abstract

A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber; and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces, wherein each of the plurality of surfaces is disposed to face an inner surface of the vacuum chamber. The first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each of the plurality of substrates. An evaporation source is disposed in the first subchamber of the vacuum chamber and is configured to deposit a plurality of absorbing layer atoms of the second type over at least a portion of the surface of each of the plurality of substrates. The first isolation source is configured to isolate the evaporation source from the first sputtering source.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Patent Application Serial No. 61 / 597,608, filed February 10, 2012, the entire contents of which are hereby incorporated by reference. technical field [0003] The present invention relates generally to the field of photovoltaics and, in particular, to apparatus and methods for producing solar cells. Background technique [0004] Copper indium gallium selenide (CIGS) is a commonly used absorber layer in thin-film solar cells. CIGS thin film solar cells have achieved excellent conversion efficiencies (>20%) in laboratory environments. The most traditional CIGS deposition is accomplished by one of two techniques, co-evaporation or selenization. Co-evaporation involves evaporating copper, indium, gallium, and selenium simultaneously. The different melting points of these four elements make it very difficult to control the formation of stoichiometric compounds on larg...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L21/203
CPCH01L31/0322H01L31/0326Y02E10/541C23C14/0623C23C14/185C23C14/24C23C14/3464C23C14/505Y02P70/50H01L21/02631H01L21/28194H01L21/02104H01L21/67011H01L21/67155H01L31/18
Inventor 邓凤山赵应诚杨智仁萧国瑞
Owner TAIWAN SEMICON MFG CO LTD