Plane chord linear displacement sensor

Abstract

The invention provides a plane chord linear displacement sensor. The plane chord linear displacement sensor comprises a sizing ruler and a measuring head, wherein silicon wafers are connected to the sizing ruler and a substrate of the measuring head in a bonding mode, an MENS photolithography is adopted to conduct even line etch on the silicon wafers to form electric conduction coils, wherein the electric conduction coil on the sizing ruler is single-phase and rectangular, the electric conduction coil on the measuring head is a three-phase sinusoid-shaped coil which is staggered by a 1/3 polar distance, and the sizing ruler coil and the measuring head coil are arranged in a relatively parallel mode. When in the sizing ruler coil, a sine is used for driving a signal, three routes of sensing signals are generated in the three-phase measuring head coil, the three routes of sensing signals are made to respectively conduct phase shift by 0 degree, 120 degrees and 240 degrees according to time and then be added together so as to obtain an electricity traveling signal, and the phase position of the electricity traveling signal corresponds to linear displacement. The plane chord linear displacement sensor has the advantages of being high in precision, low in weight, small in size and low in power consumption.

Description

technical field [0001] The invention belongs to the linear displacement sensor technology. Background technique [0002] The existing linear displacement measurement sensors are mainly represented by gratings, magnetic gratings and inductive synchronizers. The principles are all based on space characterization technology, and the displacement is obtained by accumulatively counting the number of grating lines. In order to achieve high-precision measurement, it is necessary to have high-precision scribing technology, and the scribing technology is approaching the limit. In order to overcome this problem, electronic subdivision technology is mainly used now, which leads to high manufacturing costs of sensors and anti-interference Poor strength. [0003] In recent years, colleagues have developed a time grating displacement sensor based on time pulses, which can measure the spatial position difference reflected by the moving and fixed measuring heads as a time difference, that ...

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Problems solved by technology

However, due to the inability to open more slot teeth within a limited size range, the number of grid pairs in this structure is relatively small, generally only dozens of opposite poles, and because it is a magnetic material, the mass is heavy

The winding form of the coil is a rectangular winding method, the output signal contains a large number of high-order harmonic

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