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Axicon Mirror Shape and Cone Angle Detection Method

A cone mirror and cone angle technology, applied in the field of optical detection, to achieve the effect of easy detection and simple operation

Active Publication Date: 2016-03-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

This method needs to use the rotation of the mirror to adjust the inclination of the reference beam relative to the measurement beam, so that they interfere, and then solve the surface shape information of the axicon mirror. At the same time, this method can only measure the surface shape of the axicon mirror with a large cone angle.

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  • Axicon Mirror Shape and Cone Angle Detection Method
  • Axicon Mirror Shape and Cone Angle Detection Method
  • Axicon Mirror Shape and Cone Angle Detection Method

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples, but the protection scope of the present invention should not be limited thereby.

[0023] see first figure 1 , figure 1 It is a schematic diagram of an implementation example of the axicon mirror surface shape and cone angle detection device of the present invention. As can be seen from the figure, the detection method of axicon mirror surface shape and cone angle of the present invention comprises the steps:

[0024] ①In the direction of the parallel light beam output by the short coherent light source interferometer 1, the plane standard mirror 2) the axicon mirror 3 to be measured and the standard plane mirror 4 are sequentially placed, and the plane of the axicon mirror 3 to be measured faces the interference of the short coherent light source The light output direction of instrument 1;

[0025] ② Adjust the optical path: adjust the par...

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Abstract

An axicon surface shape and cone angle detection method includes the following steps: a planar standard lens, an axicon to be detected and a standard planar reflector are sequentially arranged along the direction of parallel beams outputted by a short-coherence light source interferometer, and the plane of the axicon to be detected faces the emergent light direction of the short-coherence light source interferometer; the light path is adjusted; the distance between the axicon to be detected and the standard planar reflector is adjusted, the short-coherence light source interferometer is utilized to detect interference fringes, and the cone angle and surface shape information of the axicon to be detected is worked out. The axicon surface shape and cone angle detection method is easy to operate, can easily measure the surface shape and cone angle of an axicon with any angle, and has other advantages.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a method for detecting the surface shape and cone angle of an axicon mirror. technical background [0002] As a rotationally symmetrical pyramid optical element, the axicon lens can provide a long focal depth for the optical system. Due to this advantage, it is widely used in many fields, such as imaging optical system, optical testing, laser processing, laser beam Shaping, laser resonator, generation of non-diffraction beam, etc., and the use of axicon mirror in lithography illumination can realize the ring illumination mode. This puts forward strict requirements on the production accuracy of the axicon, and the production of the axicon requires precise measurement methods. [0003] Prior art [1] (David Kupka, Philip Schlup, and RandyA.Bartels, "Self-referenced interferometry for the characterization of axicon lens quality", Appl. Opt. 47 (9): 1200-1205 (2008).) A simple interf...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B11/26
Inventor 袁乔曾爱军张善华黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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