Frequency multiplier and preparation method based on micromachined cantilever beam capacitive power sensor
A technology of power sensor and cantilever beam, which is applied in the direction of automatic power control and electrical components, can solve the problems of low integration, large space occupied by frequency multipliers, and large DC loss, and achieve high integration, easy integration, and low The effect of power consumption
Inactive Publication Date: 2015-07-29
SOUTHEAST UNIV
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[0003] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides a frequency multiplier based on a micromechanical cantilever beam capacitive power sensor and a preparation method, which solves the problem that the traditional frequency multiplier occupies a large space and has low integration. The problem of large DC loss
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[0039] The present invention will be further described below in conjunction with the accompanying drawings.
[0040] Such as figure 1 , 2 Shown in and 3: a frequency multiplier based on a micromachined cantilever beam capacitive power sensor, including a gallium arsenide substrate 1, a ground wire, a CPW signal wire, a power combiner, and a MEMS cantilever disposed on the gallium arsenide substrate 1 The beam capacitive power sensor, and the external capacitive three-point voltage-controlled oscillator and divider define a symmetrical axis on the gallium arsenide substrate 1 .
[0041] The ground wires include an upper side ground wire 21, a lower side ground wire 22 and a common ground wire 23, and the upper side ground wire 21 and the lower side ground wire 22 are respectively arranged on the upper side and the lower side of the axis of symmetry. side, the common ground wire 23 is located on the weighing axis, the upper side ground wire 21 is connected to the common ground...
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The invention discloses a frequency multiplier and preparation method based on a micromechanics cantilever capacitive power sensor. A first CPW signal line and a second CPW signal line serve as an input end of a reference signal and an input end of a feedback signal respectively and are connected to a third CPW signal line through a two-in-one power combiner. An MEMS cantilever capacitive power sensor is formed between an anchoring zone of an MEMS cantilever and a pressure welding block of a sensing electrode by the MEMS cantilever and the sensing electrode above the third CPW signal line. A variable capacitor in the MEMS cantilever capacitive power sensor is used for composing a capacitor three-point type voltage-controlled oscillator. An output signal of the capacitor three-point type voltage-controlled oscillator is connected to the input end of the feedback signal after passing through a divider, so that a frequency multiplier loop is formed. Compared with a traditional frequency multiplier, the frequency multiplier based on the micromechanics cantilever capacitive power sensor omits a low-pass filter, occupied space is small, an integration degree is high, direct current loss is reduced, cost is further saved, and the size is further reduced.
Description
technical field [0001] The invention relates to a frequency multiplier based on a micromechanical cantilever beam capacitive power sensor and a preparation method thereof, belonging to the technical field of microelectromechanical systems (MEMS). Background technique [0002] A frequency synthesizer is a device that generates multiple frequencies from one or more reference frequencies, and is an essential key circuit in modern electronic systems. With the development of science and technology, the phase-locked loop has become an irreplaceable part of the modern communication system, and the indirect frequency synthesizer composed of the phase-locked loop plays a very important role in the field of wireless communication. The frequency synthesizer has gone through three stages of development: direct synthesis analog frequency synthesizer, phase-locked loop frequency synthesizer, and direct digital frequency synthesizer. At present, the frequency synthesizers used in various ...
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IPC IPC(8): H03L7/099
Inventor 廖小平王文岩
Owner SOUTHEAST UNIV