Lighting system and method used for dark field detection of defect in spherical optical element surface
A technology of optical components and spherical optics, applied in the direction of optical components, optical testing flaws/defects, optics, etc., can solve the problems of poor repeatability, incapable of quantitative detection, and inability to perform follow-up detection, etc., to achieve good contrast and easy subsequent image processing Effect
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[0043] This embodiment is an illumination system that can be used for dark field detection of surface defects of spherical optical elements.
[0044] lighting system such as figure 1 As shown, it includes a spherical light source 1 , a light source bracket 2 , an optical element to be tested 3 , a clamping device 4 , a microscopic imaging system 5 , a charge-coupled device CCD 6 , a computer 7 , and a motor 8 .
[0045] The spherical light source 1 is composed of a uniform surface light source and a lens barrel of a zoom lens group, and a plurality of light sources 1 are mounted on the light source bracket 2 at equal intervals in a ring. The mechanical structure of the zoom adjustment assembly S is as follows: figure 2 As shown, the zoom adjustment assembly S is composed of a zoom lens group lens barrel 16, a front fixed lens group 10, a zoom lens group 11, a rear fixed lens group 12, a zoom lens barrel 13, a gear 14, and a slide rail 15. Front fixed mirror group 10, zoom m...
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