Threshold-adjustable quicksilver microfluid inertia switch based on electrowetting
An inertial switch and electrowetting technology, applied in the direction of electric switches, circuits, electrical components, etc., can solve the problem that the threshold value is not easy to be accurately controlled, and achieve the effect of increasing the effective contact area, improving the overload capacity, and reducing the on-resistance
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[0015] Reference Figure 1-6 , This specific embodiment adopts the following technical solutions: it includes a glass cover plate 1, a top adjustment electrode 2, a bottom adjustment electrode 3, a glass substrate 4, a silicon dioxide layer 5, mercury microdroplets 6, a microchannel 7, and an air duct 8. , Liquid tank 9, signal electrode 10, microvalve 11 and silicon dioxide layer 12, top adjustment electrode 2 and bottom adjustment electrode 3 are deposited on the glass cover plate 1 and glass substrate 4, top adjustment electrode 2 and bottom adjustment electrode A silicon dioxide layer 12 is deposited on 3, the microchannel 7 is connected to the liquid tank 9, and the ends of the microchannel 7 gradually converge into the microvalve 11. The liquid tank 9 communicates with the air ducts 8 on both sides. Mercury micro-droplets 6 are arranged inside, one end of the signal electrode 10 goes deep into the liquid tank 9, and the signal electrode 10 is fixed on the silicon dioxide ...
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