Threshold-adjustable quicksilver microfluid inertia switch based on electrowetting

Abstract

The invention discloses a threshold-adjustable quicksilver microfluid inertia switch based on electrowetting, and relates to switches. A top adjustment electrode and a bottom adjustment electrode are respectively deposited on a glass cover plate and a glass substrate, silicon dioxide layers are deposited on the top adjustment electrode and the bottom adjustment electrode, a microchannel is communicated with a liquid trough through butt joint, the tail end of the microchannel changes gradually and gathers to form a micro valve, the liquid trough is communicated with gas-guide tubes on the two sides of the liquid trough, quicksilver micro-droplets are arranged inside the microchannel, one end of a signal electrode penetrates into the liquid trough, and the signal electrode is fixedly arranged on the silicon dioxide layers. According to the threshold-adjustable quicksilver microfluid inertia switch based on electrowetting, an electrowetting method is adopted, the threshold of quicksilver microfluid inertia switch can be adjusted, a 'solid-liquid' contact form is adopted, the stability of the current characteristic is guaranteed, the effective contact area of a switch contact is enlarged, the on resistance is small, the interface circuit is simple, and the overload capacity of the switch is improved. The threshold-adjustable quicksilver microfluid inertia switch based on electrowetting is suitable for the field such as military weapon systems, civil mechatronics and consumer electronics.

Description

Technical field: [0001] The invention relates to a switch, in particular to a threshold adjustable mercury microfluid inertial switch based on electrowetting. Background technique: [0002] In the fields of aerospace, automobile industry, inertial navigation, ammunition safety and control systems, automobile detection, torpedo control, etc., various new technologies are constantly emerging, and various detection and control equipment are moving in the direction of miniaturization, low energy consumption and intelligence development of. In this situation, it is required that the sensor elements and actuation elements used not only meet the requirements of miniaturization, but also provide reliable stability. Micro-inertial elements based on MEMS (Micro-Electro-Mechanical System) technology have emerged based on the above-mentioned reasons, giving full play to their small, flexible and intelligent advantages. [0003] Inertial switches, also known as g-value switches, threshold sen...

AI Technical Summary

Problems solved by technology

However, the threshold value of the existing microfluidic inertial switch is not easy to be accurately controlled. In this technology, the structure and method of controlling the threshold value are added to realize the adjustable threshold value of the microfluidic inertial switch.

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