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Movable lens adjustment device and adjustable optical system using same

A lens adjustment and optical system technology, which is applied to optics, optical components, photolithography process exposure devices, etc. Eliminate the effect of sloshing

Active Publication Date: 2013-09-18
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, during the moving process of the movable lens, there will be a movement phenomenon, resulting in low adjustment accuracy, so it is not suitable for movable lenses with high adjustment accuracy.

Method used

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  • Movable lens adjustment device and adjustable optical system using same
  • Movable lens adjustment device and adjustable optical system using same
  • Movable lens adjustment device and adjustable optical system using same

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Embodiment Construction

[0024] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0025] figure 1 It is a schematic diagram of an adjustable optical system in a preferred embodiment of the present invention. figure 2 for figure 1 Schematic diagram of the middle tube. image 3 for figure 1 Schematic diagram of the connection between the movable lens and the supporting shrapnel. Please refer to Figure 1 ~ Figure 3 . In this embodiment, the adjustable optical system 1 includes a lens barrel 10 , a movable lens 11 , a supporting spring 12 , a first fixing member 13 , a second fixing member 14 , a preload spring 15 and a movable lens adjusting device 16 . The movable lens 11 is movably disposed on the lens barrel 10 through the supporting elastic piece 12 . The first fixing part 13 and the second fixing part...

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Abstract

The invention discloses a movable lens adjustment device and an adjustable optical system using the same. The movable lens adjustment device is used for adjusting the position of a movable lens relative to a lens barrel. The movable lens adjustment device comprises a driving element, a lever, a first double-ball bearing and a second double-ball bearing. The lever comprise a body and a supporting seat, wherein the supporting seat is arranged on the lens barrel, and the body is rotatably arranged on the supporting seat and has a first support arm and a second support arm. The first double-ball bearing is connected with the driving element and the first support arm. The second double-ball bearing is connected with the second support arm and the movable lens. According to the invention, through the two double-ball bearings, slipping between the first support arm and the driving element and between the second support arm and the movable lens is avoided during rotation of the lever.

Description

technical field [0001] The invention relates to a photolithography machine equipment, in particular to a movable lens adjustment device and an adjustable optical system using the same. Background technique [0002] In the lithography projection objective lens, due to the manufacturing and assembly errors of the lens, the imaging quality of the objective lens deteriorates. In order to solve this problem, movable lenses are generally used to compensate for the manufacturing and assembly errors of the lenses. [0003] In the US patent application publication with publication number US20080204905, the movable lens is supported by three evenly distributed flexible blocks, and the movement of the movable lens is realized through elastic deformation of the flexible blocks. In the Chinese patent application publication with the application number CN200810204974, the movable lens is supported by three evenly distributed lever mechanisms, and the movement of the movable lens is reali...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02B7/02G02B7/00
Inventor 彭云平马很很王洪尊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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